Methods of forming memory cells
View Patent ↗Some embodiments include methods of forming memory cells. Programmable material may be formed directly adjacent another material. A dopant implant may be utilized to improve adherence of the programmable material to the other material by inducing bonding of the programmable material to the other material, and/or by scattering the programmable material and the other material across an interface between them. The memory cells may include first electrode material, first ovonic material, second electrode material, second ovonic material and third electrode material. The various electrode materials and ovonic materials may join to one another at boundary bands having ovonic materials embedded in electrode materials and vice versa; and having damage-producing implant species embedded therein. Some embodiments include ovonic material joining dielectric material along a boundary band, with the boundary band having ovonic material embedded in dielectric material and vice versa.
1. A method of forming a memory cell, comprising:
forming a programmable material directly against another material, the programmable material joining said other material along an interface; one or both of the programmable material and the other material having a crystallinity along said interface, and having a first concentration of dangling bonds along said interface; and
implanting a dopant species simultaneously into both the programmable material and the other material to alter the crystallinity of one or both of the other material and the programmable material along said interface, and/or to increase a concentration of dangling bonds along the interface.
2. The method of claim 1 wherein the implanting the dopant alters the crystallinity within one or both of the other material and the programmable material along said interface.
3. The method of claim 1 wherein the implanting the dopant increases a concentration of dangling bonds along said interface.
4. The method of claim 1 wherein the other material is an electrically insulative material.
5. The method of claim 1 wherein the other material is an electrically conductive electrode material.
6. The method of claim 5 wherein the electrode material comprises one or more of TiSiN, TiAIN, TiN, WN, Ti, C and W; where the formulas indicate the components within the listed compounds, rather than designating specific stoichiometries of such components.
7. The method of claim 1 wherein the programmable material comprises one or more of germanium, antimony, tellurium and indium.
8. The method of claim 1 wherein the dopant comprises one or more of arsenic, boron, germanium, argon, nitrogen, antimony, indium and xenon.
9. The method of claim 1 wherein the dopant comprises metal.