Methods for relaxation and transfer of strained layers and structures fabricated thereby
View Patent ↗The present invention provides methods for forming at least partially relaxed strained material layers on a target substrate. The methods include forming islands of the strained material layer on an intermediate substrate, at least partially relaxing the strained material islands by a first heat treatment, and transferring the at least partially relaxed strained material islands to the target substrate. The at least partial relaxation is facilitated by the presence of low-viscosity or compliant layers adjacent to the strained material layer. The invention also provides semiconductor structures having an at least partially relaxed strained material layer, and semiconductor devices fabricated using an at least partially relaxed strained material layer.
1. A method for forming islands of an at least partially relaxed strained material on a target substrate comprising:
forming islands from a strained material layer on an intermediate substrate;
performing a first heat treatment so as to at least partially relax the strained material islands; and
transferring the at least partially relaxed strained material islands to the target substrate by:
depositing a low-viscosity layer on the at least partially relaxed strained material islands; bonding the low-viscosity layer to the target substrate; and
performing, after transfer to the target substrate, a second heat treatment so as to further relax the at least partially relaxed strained material islands.
2. The method of claim 1 , wherein the intermediate substrate and the target substrate comprise the same material.
3. The method of claim 1 , wherein the islands are formed on a buried low-viscosity layer on the intermediate substrate with the partial relaxation of the strained material islands resulting in plastic deformation and reflow of the buried low-viscosity layer.
4. The method of claim 3 , wherein the low-viscosity layer comprises an absorption layer suitable for absorbing electromagnetic radiation.
5. The method of claim 4 , which further comprises applying electromagnetic radiation to the absorption layer through the intermediate substrate to detach the intermediate substrate from the at least partially relaxed strained material islands bonded to the target substrate.
6. The method of claim 1 , wherein forming the islands further comprises:
growing a strained material on a seed substrate;
depositing a first low-viscosity layer on the strained material layer;
bonding the first low-viscosity layer to the intermediate substrate; and
transferring the strained material layer from the seed substrate to the intermediate substrate.
7. The method of claim 6 , wherein the first low-viscosity layer comprises an absorption layer suitable for absorbing electromagnetic radiation and wherein the seed substrate and the intermediate substrate comprise the same material.
8. The method of claim 6 , wherein the seed substrate, the intermediate substrate, and the target substrate comprise one or more of sapphire, silicon, SiC, and Ge, the strained material layer comprises InGaN, and the first low-viscosity layer comprises one or more of a compound or mixture of SiO2 and boron, a compound or mixture of SiO2 and phosphorous, and a borophosphosilicate glass, or both.
9. The method of claim 8 , wherein the seed substrate comprises a seed layer of GaN material, and the strained material comprises InGaN.
10. The method of claim 6 , which further comprises
wherein the first low viscosity layer forms a first buried layer after transfer of the at least partially relaxed strained material islands to the target substrate, and the method further comprises, prior to the first heat treatment:
depositing a further layer on the strained material; and
patterning the further layer and the strained material;
wherein the further layer either is a compliant second low viscosity layer or is a second buried layer after transfer of the at least partially relaxed strained material islands to the target substrate.
11. The method of claim 6 , which further comprises patterning the strained material layer so as to form strained material islands separated by interspaces.
12. A method for forming islands of an at least partially relaxed strained material on a target substrate which comprises:
forming islands from a strained material layer on an intermediate substrate by:
growing a strained material on a seed substrate;
depositing a first low-viscosity layer on the strained material layer;
bonding the first low-viscosity layer to the intermediate substrate; and
transferring the strained material layer from the seed substrate to the intermediate substrate;
performing a first heat treatment so as to at least partially relax the strained material islands; and
transferring the at least partially relaxed strained material islands to the target substrate;
wherein residuals of the seed layer remaining on the strained layer after transfer serve as a stiffening layer during the thermal treatment.
13. The method of claim 12 , wherein the intermediate substrate and the target substrate comprise the same material.
14. The method of claim 12 , wherein the first low-viscosity layer comprises an absorption layer suitable for absorbing electromagnetic radiation.
15. The method of claim 14 , which further comprises applying electromagnetic radiation to the absorption layer through the intermediate substrate to detach the intermediate substrate from the at least partially relaxed strained material islands bonded to the target substrate.
16. The method of claim 12 , wherein the strained material islands are separated by interspaces and are formed by patterning the strained layer.
17. A method for forming islands of an at least partially relaxed strained material on a target substrate which comprises:
forming islands from a strained material layer on an intermediate substrate by:
growing a strained material on a seed substrate;
depositing a first low-viscosity layer on the strained material layer;
at least partially patterning the first low viscosity layer;
bonding the first low-viscosity layer to the intermediate substrate; and
transferring the strained material layer from the seed substrate to the intermediate substrate;
performing a first heat treatment so as to at least partially relax the strained material islands; and
transferring the at least partially relaxed strained material islands to the target substrate.
18. The method of claim 17 , wherein the intermediate substrate and the target substrate comprise the same material.
19. The method of claim 17 , wherein the first low-viscosity layer comprises an absorption layer suitable for absorbing electromagnetic radiation.
20. The method of claim 19 , which further comprises applying electromagnetic radiation to the absorption layer through the intermediate substrate to detach the intermediate substrate from the at least partially relaxed strained material islands bonded to the target substrate.
21. The method of claim 17 , wherein the strained material islands are separated by interspaces and are formed by patterning the strained layer.