Semiconductor device and method for manufacturing the same
A semiconductor device manufacturing method of an embodiment includes the steps of: forming a first insulating layer on a semiconductor substrate; forming on the first insulating layer an amorphous or polycrystalline semiconductor layer having a narrow portion; forming on the semiconductor layer a second insulating layer having a thermal expansion coefficient larger than that of the semiconductor layer; performing thermal treatment; removing the second insulating layer; forming a gate insulating film on the side faces of the narrow portion; forming a gate electrode on the gate insulating film; and forming a source-drain region in the semiconductor layer.
1. A semiconductor device manufacturing method, comprising:
forming a first insulating layer on a semiconductor substrate;
forming an amorphous or polycrystalline first semiconductor layer on the first insulating layer;
forming a second insulating layer on the first semiconductor layer;
forming an amorphous or polycrystalline second semiconductor layer on the second insulating layer;
patterning the second semiconductor layer, the second insulating layer and the first semiconductor layer, to form a narrow portion in the first and second semiconductor layers;
forming on the first and second semiconductor layers a third insulating layer having a thermal expansion coefficient larger than a thermal expansion coefficient of the first and second semiconductor layers;
performing thermal treatment;
removing the third insulating layer;
forming a gate insulating film on the side faces of the narrow portion;
forming a gate electrode on the gate insulating film; and
forming a plurality of source regions and drain regions in each of the first semiconductor layer and second semiconductor layer.
2. The method according to claim 1 , wherein at least two of the source regions formed in the first and second semiconductor layers are electrically independent, or at least two of the drain regions formed in the first and second semiconductor layers are electrically independent.
3. The method according to claim 1 , wherein the source regions formed in the first and second semiconductor layers are made electrically common, while drain regions formed in the first and second semiconductor layers are made electrically common.
4. The method according to claim 1 , further comprising between the forming the gate insulating film and the forming the gate electrode:
forming a charge-storage insulating film on the gate insulating film; and
forming a block insulating film on the charge-storage insulating film.
5. The method according to claim 2 , wherein the first and second semiconductor layers are silicon.
6. The method according to claim 1 , wherein the third insulating layer is a silicon nitride film.