Display device and manufacturing method thereof
View Patent ↗A display device in which a plurality of gate wires and a plurality of drain wires that intersect the gate wires are provided, and thin film transistors connected to the gate wires and the drain wires are formed for respective pixel regions. At least one of the gate wires, the drain wires, and lead wires drawn from the gate wires or the drain wires is formed of a light-transmitting patterned conductive film. The light-transmitting patterned conductive film is formed of at least a first light-transmitting patterned conductive film, and a second light-transmitting patterned conductive film laminated on the first light-transmitting patterned conductive film. The second light-transmitting patterned conductive film is formed of a conductive film for coating only the surface of the first light-transmitting patterned conductive film including its side wall surface.
1. A manufacturing method of a display device having a thin film transistors in matrix formed on a substrate, comprising:
a first film forming step of forming a first light-transmitting conductive film on the substrate;
a first pattern step of providing a first light-transmitting patterned conductive film in patterned crystallized state by subjecting the first light-transmitting conductive film to selective etching through a photolithography technique;
a second film forming step of forming a second light-transmitting conductive film on the substrate, which coats the first light-transmitting patterned conductive film; and
a second pattern step of providing a second light-transmitting patterned conductive film on the first light-transmitting patterned conductive film in self-alignment by subjecting at least the second light-transmitting conductive film to wet etching.
2. The manufacturing method of a display device according to claim 1 , wherein the first pattern step includes a step of providing a crystallized first light-transmitting patterned conductive film by subjecting a conductive film pattern derived from the selective etching to annealing treatment.
3. The manufacturing method of a display device according to claim 1 , further comprising:
a third film forming step of forming the second light-transmitting conductive film on the substrate again, which coats the second light-transmitting patterned conductive film; and
a third pattern step of forming the second light-transmitting patterned conductive film again in self-alignment on the second light-transmitting patterned conductive film by subjecting the second light-transmitting conductive film to the wet etching,
wherein the third film forming step and the third pattern step are repeatedly conducted to form a light-transmitting conductive film with a predetermined thickness.
4. The manufacturing method of a display device according to claim 2 , further comprising:
a third film forming step of forming the second light-transmitting conductive film on the substrate again, which coats the second light-transmitting patterned conductive film; and
a third pattern step of forming the second light-transmitting patterned conductive film again in self-alignment on the second light-transmitting patterned conductive film by subjecting the second light-transmitting conductive film to the wet etching,
wherein the third film forming step and the third pattern step are repeatedly conducted to form a light-transmitting conductive film with a predetermined thickness.
5. The manufacturing method of a display device according to claim 1 , wherein an oxalic acid etching solution is used for the wet etching.
6. The manufacturing method of a display device according to claim 2 , wherein an oxalic acid etching solution is used for the wet etching.
7. The manufacturing method of a display device according to claim 3 , wherein an oxalic acid etching solution is used for the wet etching.