IP Library Granted Patent US 8,415,640
Granted Patent B2
US 8,415,640 · App. 13/089,547 · Granted Apr 9, 2013

Diamond nanowires

Inventors: Thomas M. Babinec (Watertown, MA); Birgit J. M. Hausmann (Watertown, MA); Mughees Khan (Belmont, MA); Yinan Zhang (Cambridge, MA); Philip R. Hemmer (College Station, TX); Marko Loncar (Cambridge, MA)
Assignee: President and Fellows of Harvard College
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Quick Facts
Patent No.
US 8,415,640
App. No.
13/089,547
Granted
Apr 9, 2013
Kind
B2
Abstract

In a general aspect, a system includes a plurality of diamond nanowires disposed on the surface of a diamond substrate, at least some of the nanowires including a color center. The system also includes a light source configured to illuminate at least one of the plurality of nanowires with excitation light at a wavelength corresponding to an excitation wavelength of the color center included in the illuminated nanowire; and an optical receiver configured to receive a fluorescence emitted from the color center included in the illuminated nanowire in response to the excitation light.

Claims (32)

1. A system comprising:

a plurality of diamond nanowires disposed on the surface of a diamond substrate that includes a plurality of color centers, at least some of the nanowires formed in the substrate with portions of the surface of the substrate selectively removed in a region including at least one color center to include a color center in at least some of the nanowires;

a light source configured to illuminate at least one of the plurality of nanowires with excitation light at a wavelength corresponding to an excitation wavelength of the color center included in the illuminated nanowire; and

an optical receiver configured to receive a fluorescence emitted from the color center included in the illuminated nanowire in response to the excitation light.

2. The system of claim 1 , wherein the optical receiver is at least one of an optical fiber and a detector.

3. The system of claim 1 , wherein each nanowire has a diameter of about 200 nm and a length of about 2 μm.

4. The system of claim 3 , wherein the length of the nanowires is in a direction perpendicular to the surface of the substrate.

5. The system of claim 1 , wherein a lifetime of the fluorescence emitted from the at least one color center is between about 10 ns and about 25 ns.

6. The system of claim 1 , wherein a first end of the illuminated nanowire is in contact with the surface of the substrate, and wherein the optical receiver is positioned to receive the emitted fluorescence from a distal end of the illuminated nanowire.

7. The system of claim 1 , wherein the fluorescence is emitted from the at least one color center in a mode propagating substantially perpendicularly away from the surface of the substrate.

8. The system of claim 1 , wherein the optical receiver is positioned to receive at least 10% of the emitted fluorescence.

9. The system of claim 1 , wherein the fluorescence includes at least 100,000 photons per second.

10. The system of claim 1 , wherein the illuminated nanowire is configured to emit fluorescence at a temperature greater than about 300 K.

11. A method comprising:

providing a diamond substrate that includes a plurality of color centers; and

selectively removing a portion of the surface of the substrate to provide a plurality of diamond nanowires, including selectively removing a portion of the surface of the substrate in a region including at least one color center.

12. The method of claim 11 , wherein the plurality of color centers in the diamond substrate are distributed substantially randomly.

13. The method of claim 11 , further comprising implanting at least one color center in at least some of the plurality of diamond nanowires.

14. The method of claim 11 , further comprising forming a microelectromechanical systems (MEMS) or nanoelectromechanical systems (NEMS) device including at least one of the plurality of diamond nanowires.

15. The method of claim 14 , wherein the MEMS or NEMS device includes at least one of a mechanical resonator and an atomic force microscopy (AFM) probe.

16. The method of claim 11 , further comprising:

illuminating at least some of the plurality of nanowires with excitation light at a wavelength corresponding to an excitation wavelength of the nitrogen vacancy centers; and

receiving a fluorescence emitted from at least one nitrogen vacancy center in response to the excitation.

17. The method of claim 16 wherein receiving the fluorescence includes detecting at least 10% of the emitted fluorescence.

18. The method of claim 16 , wherein receiving the fluorescence includes receiving the fluorescence into an optical fiber.

19. The method of claim 11 , wherein selectively removing a portion of the surface of the substrate includes fabricating nanowires with diameter of about 200 nm and a length of about 2 μm.

20. The method of claim 11 , wherein selectively removing a portion of the surface of the substrate includes:

lithographically defining a pattern on the surface of the substrate corresponding to an arrangement of the nanowires; and

etching the surface of the substrate according to the lithographically defined pattern.

21. The method of claim 20 , wherein etching the surface of the substrate includes performing a reactive ion etch for about 10 minutes.

22. The method of claim 21 , wherein performing the reactive ion etch includes: applying an inductively coupled plasma (ICP) power of about 700 W for about two minutes; applying an ICP power of about 600 W for about three minutes; and applying an ICP power of about 1000 W for about five minutes.

23. The method of claim 21 , wherein performing the reactive ion etch includes performing the etch under at least one of the following conditions: in an atmosphere of 30 sccm of oxygen gas, at a pressure of 10 mTorr, and at a bias power of about 100 W.

Assignments (3)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 11, 2017
From: BABINEC, THOMAS M.; HAUSMANN, BIRGIT J.M.; KHAN, MUGHEES; LONCAR, MARKO; ZHANG, YINAN
To: PRESIDENT AND FELLOWS OF HARVARD COLLEGE
Reel/Frame 042963/0165 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 11, 2017
From: HEMMER, PHILIP R.
To: THE TEXAS A&M UNIVERSITY SYSTEM
Reel/Frame 042963/0600 →
CONFIRMATORY LICENSE Recorded May 25, 2012
From: HARVARD UNIVERSITY
To: NATIONAL SCIENCE FOUNDATION
Reel/Frame 028275/0242 →
Continuity (2)
Provisional Application 61325543 · Apr 19, 2010
Related Publication 20110309265A1 · Dec 22, 2011