Method for manufacturing semiconductor device
According to one embodiment, a method is disclosed for manufacturing a semiconductor device. The method can include die bonding to bond a semiconductor element to a first position of a base member via a bonding layer provided on one surface of the semiconductor element. The method can include wire bonding to connect a terminal formed on the semiconductor element to a terminal formed on the base member by a bonding wire. In addition, the method can include sealing to seal the semiconductor element and the bonding wire. Viscosity of the bonding layer in the bonding is controlled not to exceed the viscosity of the bonding layer in the sealing.
1. A method for manufacturing a semiconductor device, comprising: die bonding to bond a semiconductor element to a first position of a base member via a bonding layer provided on one surface of the semiconductor element; wire bonding to connect a terminal formed on the semiconductor element to a terminal formed on the base member by a bonding wire; and sealing to seal the semiconductor element and the bonding wire, viscosity of the bonding layer in the bonding being controlled not to exceed the viscosity of the bonding layer in the sealing, and a bonding material forming the bonding layer is controlled to be 0.015 Pa·s or less at 25° C.
2. The method according to claim 1 , wherein the viscosity of the bonding layer in the sealing at a temperature of the sealing is controlled to be 10 7 Pa·s or less.
3. The method according to claim 1 , wherein the viscosity of the bonding layer in the sealing at a temperature of the sealing is controlled to be 15000 Pa·s or more.
4. The method according to claim 3 , wherein the viscosity of the bonding layer in the sealing at the temperature of the sealing is controlled by heating the bonding layer.
5. The method according to claim 1 , wherein the viscosity of the bonding layer in the die bonding at a die bonding temperature is controlled to be 10 Pa·s or more.
6. The method according to claim 1 , wherein the viscosity of the bonding layer in the die bonding at a die bonding temperature is controlled to be 3000 Pa·s or less.
7. The method according to claim 5 , wherein the viscosity of the bonding layer in the die bonding at the die bonding temperature is controlled by heating the bonding layer.
8. The method according to claim 1 , wherein the viscosity of the bonding layer in the bonding at a bonding temperature is controlled to be 15000 Pa·s or more.
9. The method according to claim 1 , wherein the viscosity of the bonding layer in the bonding at a bonding temperature is controlled to be 10 7 Pa·s or less.
10. The method according to claim 8 , wherein the viscosity of the bonding layer in the bonding at the bonding temperature is controlled by heating the bonding layer.
11. The method according to claim 1 , wherein the viscosity at 25° C. of the bonding material forming the bonding layer is controlled by at least one of amount of solute of the bonding material and amount of solvent of the bonding material.
12. The method according to claim 1 , further comprising:
forming bonding material to the surface of the semiconductor element by noncontact applicator; and
forming the bonding layer by converting the attached bonding material to B-stage.
13. The method according to claim 12 , wherein the attaching of the bonding material is performed a plurality of times.
14. The method according to claim 13 , wherein thickness of a film formed by attaching the bonding material a plurality of times is set to approximately 10 μm.
15. The method according to claim 12 , wherein the attached bonding material is converted to the B-stage by heat treatment.
16. The method according to claim 15 , wherein temperature in the heat treatment of the attached bonding material is 40° C. or more and 120° C. or less.
17. The method according to claim 1 , wherein the bonding material includes an additive operative to suppress surface tension difference.
18. The method according to claim 12 , wherein the bonding layer is formed on a surface opposed to a surface with a circuit pattern formed thereon.
19. The method according to claim 12 , wherein the bonding material is formed to the surface of the semiconductor element by an ink jet method.