IP Library Granted Patent US 9,385,322
Granted Patent B2
US 9,385,322 · App. 13/095,619 · Granted Jul 5, 2016

Method and apparatus for depositing LED organic film

Inventors: Vladimir Bulovic (Lexington, MA); Marc A. Baldo (Cambridge, MA); Martin A. Schmidt (Reading, MA); Valerie Gassend (San Carlos, CA); Jianglong Chen (San Jose, CA)
Assignee: Massachusetts Institute of Technology
H01L51/0011C23C16/04C23C16/042C23C16/448C23C16/4481C23C16/4483C23C16/4485C23C16/45568B05D1/12C23C16/45565H01L51/56
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Quick Facts
Patent No.
US 9,385,322
App. No.
13/095,619
Granted
Jul 5, 2016
Kind
B2
Abstract

In one embodiment the disclosure relates to an apparatus for depositing an organic material on a substrate, including a source heater for heating organic particles to form suspended organic particles; a transport stream for delivering the suspended organic particles to a discharge nozzle, the discharge nozzle having a plurality of micro-pores, the micro-pores providing a conduit for passage of the suspended organic particles; and a nozzle heater for pulsatingly heating the micro-pores nozzle to discharge the suspended organic particles from the discharge nozzle.

Claims (22)

1. A method for depositing a layer of substantially solvent-free organic material on a substrate, comprising:

heating the organic material to form a plurality of suspended organic particles;

delivering the suspended organic particles to a discharge nozzle, the discharge nozzle having a plurality of micro-pores for receiving the suspended organic particles;

processing the suspended organic particles through the plurality of micro-pores to substantially block a portion of the suspended organic particles; and

energizing the discharge nozzle to pulsatingly eject the suspended organic particles from the plurality of micro-pores onto the substrate.

2. The method of claim further comprising positioning the discharge nozzle proximal to the substrate.

3. The method of claim 1 , wherein the step of energizing the discharge nozzle further comprises heating the discharge nozzle.

4. The method of claim 1 , wherein the step of delivering the suspended organic particles further comprises transporting the suspended organic particles with a carrier gas.

5. The method of claim 4 , wherein the carrier gas is inert.

6. The method of claim 1 , wherein the step of energizing the discharge nozzle further comprises mechanically vibrating the discharge nozzle.

7. The method of claim 1 , wherein processing the suspended organic material further comprises processing the suspended organic material through micro-pores having a porous medium to separate a quantity of organic particles from a quantity of solvent.

8. The method of claim 1 , wherein processing the suspended organic material further comprises separating an organic material from a solvent.

9. The method of claim 1 , further comprising deflecting thermal radiation from the discharge nozzle.

10. A method for depositing substantially solvent-free organic film on a substrate, the method comprising:

transporting an OLED solution from a reservoir to a discharge nozzle, the OLED solution having OLED particles in a solvent;

receiving the OLED solution at a plurality of micro-pores of the discharge nozzle, each micro-pore containing a porous medium;

separating a quantity of OLED particles from the solvent at the porous medium of the micro-pores;

removing the solvent from the discharge nozzle; and

dislodging the quantity of organic particles from the discharge nozzle onto a substrate.

11. The method of claim 10 , wherein transporting an OLED solution from a reservoir to a discharge nozzle further comprises heating the OLED solution.

12. The method of claim 10 , wherein the OLED solution comprises a quantity of OLED particles dissolved in solvent.

13. The method of claim 10 , further comprising heating the discharge nozzle to dislodge the quantity of organic particles.

Continuity (4)
Division 11282472 · Nov 21, 2005
Continuation 13050907 · Mar 17, 2011
Continuation 13088323 · Apr 15, 2011
Related Publication 20110262624A1 · Oct 27, 2011