Semiconductor device having ferroelectric capacitor
The present invention provides a method for manufacturing a semiconductor device, including the steps of: forming a first ferroelectric film on a first conductive film by a film-forming method including at least a step of forming a film by a sol-gel method; forming a second ferroelectric film on the first ferroelectric film by a sputtering method; forming a second conductive film on the second ferroelectric film; and forming a capacitor provided with a lower electrode, a capacitor dielectric film and an upper electrode by patterning the first conductive film, the first and second ferroelectric films and the second conductive film.
1. A semiconductor device, comprising:
a semiconductor substrate;
an interlayer insulating film formed over the semiconductor substrate; and
a capacitor formed on the interlayer insulating film,
wherein the capacitor including a lower electrode, a capacitor dielectric film made of a ferroelectric material, and an upper electrode,
wherein the capacitor dielectric film includes a first ferroelectric film and a second ferroelectric film formed on the first ferroelectric film,
wherein the first ferroelectric film includes a first film and a second film formed on the first film, the second film being thinner than the first film and burying an unevenness of an upper surface of the first film, and
wherein the second ferroelectric film being doped with an additive element and being thinner than the first ferroelectric film.
2. The semiconductor device according to claim 1 ,
wherein the first film being not doped with the additive element.
3. The semiconductor device according to claim 2 , wherein an unevenness of an upper surface of the second film is smaller than the unevenness of the first film.
4. The semiconductor device according to claim 1 , wherein the additive element is any one of elements of strontium, calcium, niobium, iridium and lanthanum.
5. The semiconductor device according to claim 1 , wherein the first film is formed by any one of a MOCVD method and a MOD method, and the second film is formed by a sol-gel method.
6. The semiconductor device according to claim 5 , wherein the second ferroelectric film is formed by a sputtering method.