Fabrication method of flexible devices
View Patent ↗Disclosed is a method of fabricating a flexible device, which includes surface-treating one or both sides of a carrier plate so that regions with different surface-treatments are formed on the same side of the carrier plate, forming a glass-filler reinforced plastic substrate film on the surface-treated carrier plate, forming thin film patterns on the glass-filler reinforced plastic substrate film, and separating the glass-filler reinforced plastic substrate film having the thin film patterns formed thereon from the carrier plate, and in which the surface-treating of the carrier plate enables the glass-filler reinforced plastic substrate film to be easily separated from the carrier plate without an additional process such as using a solvent or a laser release technique.
1. A method of fabricating a flexible device, comprising:
surface-treating one or both sides of a carrier plate in a regionally selective manner so that regions with different surface-treatments are formed on the same side of the carrier plate;
forming a glass-filler reinforced plastic substrate film on the carrier plate which was surface-treated as aforesaid, the glass-filler reinforced plastic substrate film being provided in a form of a transparent composite in which a glass-filler is impregnated with a transparent siloxane based resin having a crosslinkable reactive group;
forming thin film patterns on the aforesaid glass-filler reinforced plastic substrate film; and
separating the glass-filler reinforced plastic substrate film having the thin film patterns formed thereon from the carrier plate.
2. The method of claim 1 , wherein the carrier plate comprises glass.
3. The method of claim 1 , wherein the differently surface-treated regions comprise a region formed by plasma or ion beam treatment, or a region formed by depositing or coating an organosilane or organosilazane or a siloxane based resin composition.
4. The method of claim 1 , wherein the surface-treating comprises surface modification of a carrier plate using plasma or ion beam treatment, or surface modification of a carrier plate using a thin film coating of an organosilane or organosilazane or a siloxane based resin or an organic resin.
5. The method of claim 1 , wherein the glass-filler is selected from the group consisting of glass cloth or glass fabric, nonwoven glass fabric, glass mesh, glass beads, glass powder, glass flakes, chopped glass, milled glass, fumed silica sol, colloidal silica, and combinations thereof.
6. The method of claim 1 , wherein the forming the glass-filler reinforced plastic substrate film is performed by impregnating the glass-filler with a crosslinkable siloxane based resin and then applying pressure thereto so as to achieve surface flatness.
7. The method of claim 1 , wherein the glass-filler reinforced plastic substrate film is coated with a coating layer so as to achieve flatness and/or gas barrier property.
8. The method of claim 7 , wherein the coating layer comprises at least one of a crosslinkable organic resin, a crosslinkable organic resin having inorganic nanoparticles dispersed therein or an inorganic film and combinations thereof.
9. The method of claim 1 , wherein the thin film pattern comprises a thin film transistor, a liquid crystal display, an electrophoretic display, an organic light emitting diode, a plasma display, a touch screen panel, a solar cell, or an optical device.