Reducing Adhesion between a Conformable Region and a Mold
Improved preferential adhesion and release characteristics are described with respect to a substrate and a mold having imprinting material disposed therebetween, in the absence of an a priori release layer on the mold. The imprinting material is a polymerizable material including a fluorinated surfactant and a photoinitiator. The surfactant includes —CH 2 CH 2 CH 2 O—, —CH(CH 3 )CH 2 O—, —OCH(CH 3 )CH 2 —, —CH(CH 3 )CH(CH 3 )O—, or a combination thereof.
1 . An imprint lithography method comprising:
locating an imprinting material between an imprint lithography mold and an imprint lithography substrate, wherein:
the imprinting material is a polymerizable composition comprising a fluorinated surfactant,
the surfactant comprises —CH 2 CH 2 CH 2 O—, —CH(CH 3 )CH 2 O—, —OCH(CH 3 )CH 2 —, —CH(CH 3 )CH(CH 3 )O—, or a combination thereof, and
the imprint lithography mold does not have an a priori release layer,
contacting the imprinting material with the imprint lithography mold;
solidifying the imprinting material between the imprint lithography mold and the imprint lithography substrate to form a solidified imprinting layer between the imprint lithography mold and the imprint lithography substrate; and
separating the imprint lithography mold from the solidified imprinting layer, thereby leaving the solidified imprinting layer adhered to the imprint lithography substrate.
2 . The method of claim 1 , wherein locating the imprinting material between the imprint lithography mold and the imprint lithography substrate comprises disposing a plurality of droplets of the imprinting material on the imprint lithography substrate.
3 . A imprint lithography mold assembly comprising:
an imprint lithography mold,
an imprint lithography substrate; and
an imprinting material disposed between and in contact with the imprint lithography mold and the imprint lithography substrate,
wherein:
the imprinting material is a polymerizable composition comprising a fluorinated surfactant,
the surfactant comprises —CH 2 CH 2 CH 2 O—, —CH(CH 3 )CH 2 O—, —OCH(CH 3 )CH 2 —, —CH(CH 3 )CH(CH 3 )O—, or a combination thereof, and
the imprint lithography mold does not have an a priori release layer,
solidifying the imprinting material between the imprint lithography mold and the imprint lithography substrate to form a solidified imprinting layer adhered to the imprint lithography substrate; and
separating the imprint lithography mold from the solidified imprinting layer such that the solidified imprinting layer remains adhered to the substrate.
4 . The mold assembly of claim 3 , wherein the mold comprises a material selected from the group consisting of fused silica, quartz, iridium tin oxide, diamond-like carbon, MoSi, sol-gels, silicon, organic polymers, siloxane polymers, borosilicate glass, and fluorocarbon polymers.
5 . An imprinting material comprising;
one or more polymerizable components;
a fluorinated surfactant comprising —CH 2 CH 2 CH 2 O—, —CH(CH 3 )CH 2 O—, —OCH(CH 3 )CH 2 —, —CH(CH 3 )CH(CH 3 )O—, or a combination thereof; and
a photoinitiator.
6 . The imprinting material of claim 5 , wherein the surfactant comprises a poly(oxyalkylene) group.
7 . The imprinting material of claim 6 , wherein the poly(oxyalkylene) group comprises two or more different groups selected from the group consisting of —CH 2 CH 2 O—, —CH 2 CH 2 CH 2 O—, —CH(CH 3 )CH 2 O—, —OCH(CH 3 )CH 2 —, and —CH(CH 3 )CH(CH 3 )O—.
8 . The imprinting material of claim 6 , wherein the poly(oxyalkylene) group comprises straight chain oxypropylene groups, branched chain oxypropylene groups, or a combination thereof.
9 . The imprinting material of claim 8 , wherein the poly(oxyalkylene) group consists of straight chain oxypropylene groups, branched chain oxypropylene groups, or a combination thereof.
10 . The imprinting material of claim 6 , wherein the poly(oxyalkylene) group comprises straight chain oxyethylene groups, branched chain oxyethylene groups, or a combination thereof.
11 . The imprinting material of claim 10 , wherein the poly(oxyalkylene) group consists of straight chain oxyethylene groups, branched chain oxyethylene groups, or a combination thereof.
12 . The imprinting material of claim 6 , wherein the poly(oxyalkylene) group comprises:
at least one group selected from group consisting of straight chain oxypropylene groups and branched chain oxypropylene groups; and
at least one group selected from the group consisting of straight chain oxyethylene groups and branched chain oxyethylene groups.
13 . The imprinting material of claim 11 , wherein the ratio of oxyethylene groups to oxypropylene groups ranges from 2:1 to 0.5:1.
14 . The imprinting material of claim 5 , wherein the surfactant is non-ionic.
15 . The imprinting material of claim 5 , wherein the imprinting material has a viscosity of less than about 20 cP at room temperature.
16 . The imprinting material of claim 5 , wherein at least one of the polymerizable components is selected from the group consisting of vinyl ethers, acrylates, diacrylates, methacrylates, epoxies, and sulfur-containing compounds.
17 . The imprinting material of claim 5 , wherein the photoinitiator is a cationic photoinitiator.