Semiconductor device and method of fabricating the same
View Patent ↗A method of fabricating a semiconductor device includes following steps. A substrate is provided, wherein a first dielectric layer having a trench therein is formed on the substrate, a source/drain region is formed in the substrate at two sides of the trench, and a second dielectric layer is formed on the substrate in the trench. A first physical vapor deposition process is performed to form a Ti-containing metal layer in the trench. A second physical vapor deposition process is performed to form an Al layer on the Ti-containing metal layer in the trench. A thermal process is performed to anneal the Ti-containing metal layer and the Al layer so as to form a work function metal layer. A metal layer is formed to fill the trench.
1. A semiconductor device, comprising:
a substrate, having a first dielectric layer thereon, wherein the first dielectric layer has a trench therein;
a gate structure, disposed on the substrate in the trench and comprising:
a work function metal layer, disposed in the trench, and comprising a TiAl 3 phase metal layer and an Al metal layer disposed on the TiAl 3 phase metal layer, wherein the Al layer has a thickness ranging from 3 nm to 10 nm; and
a metal layer filling the trench;
a second dielectric layer, disposed between the gate structure and the substrate; and
a source/drain region, disposed in the substrate at two sides of the gate structure.
2. A semiconductor device, comprising:
a substrate, having a first dielectric layer thereon, wherein the first dielectric layer has a trench therein;
a gate structure, disposed on the substrate in the trench and comprising:
a work function metal layer, disposed in the trench, and comprising a Ti-containing metal layer and a TiAl 3 phase metal layer disposed on the Ti-containing metal layer, wherein the Ti-containing metal layer is a TiAl metal layer, wherein the Ti-containing metal layer has a thickness ranging from 2 nm to 10 nm; and
a metal layer filling the trench;
a second dielectric layer, disposed between the gate structure and the substrate; and
a source/drain region, disposed in the substrate at two sides of the gate structure.
3. The semiconductor device as claimed in claim 1 , wherein a thickness of TiAl 3 phase metal layer is larger than a thickness of the Al layer.
4. The semiconductor device as claimed in claim 2 , wherein a thickness of TiAl 3 phase metal layer is larger than a thickness of the Ti-containing metal layer.