Light emitting diode and method of fabrication thereof
View Patent ↗A method includes providing an LED element including a substrate and a gallium nitride (GaN) layer disposed on the substrate. The GaN layer is treated. The treatment includes performing an ion implantation process on the GaN layer. The ion implantation process may provide a roughened surface region of the GaN layer. In an embodiment, the ion implantation process is performed at a temperature of less than approximately 25 degrees Celsius. In a further embodiment, the substrate is at a temperature less than approximately zero degrees Celsius during the ion implantation process.
1. A method, comprising:
providing a vertical structure LED element having a topmost gallium nitride (GaN) layer disposed on a substrate, wherein the GaN is at least one of a p-type layer and an n-type layer; and
treating the an entire surface of the topmost GaN layer, wherein the treating includes performing an ion implantation process on the topmost GaN layer and performing a macro-roughening treatment.
2. The method of claim 1 , wherein the substrate is at a temperature less than approximately zero degrees Celsius during the performing the ion implantation process.
3. The method of claim 1 , wherein the performing the macro-roughening treatment includes performing a wet etch prior to the ion implantation.
4. The method of claim 3 , wherein the wet etch includes KOH.
5. The method of claim 1 , wherein the treating provides a macro-roughening and a micro-roughening of an exposed surface of the topmost GaN layer.
6. The method of claim 1 , wherein the ion implantation process includes implanting a species from the group consisting of As, P, BF2, B, F, N, Sb, Xe, and combinations thereof.
7. The method of claim 1 , further comprising: forming an electrode on the treated topmost GaN layer.
8. The method of claim 1 , wherein the topmost GaN layer is a n-type GaN layer.
9. The method of claim 1 , wherein the ion implantation process is performed at a temperature of less than approximately 25 degrees Celsius.
10. The method of claim 1 , wherein the treating is performed such that the ion implantation process and the macro-roughening treatment each roughen the entire surface of the topmost GaN layer, and wherein the macro-roughening treatment causes the entire surface of the topmost GaN layer to have a substantially greater peak-to-valley difference than the ion implantation process.
11. A method, comprising:
providing a vertical structure LED element that includes a first doped semiconductor layer, a light-emitting layer disposed over the first doped semiconductor layer, and a second doped semiconductor layer disposed over the light-emitting layer, wherein the first and second doped semiconductor layers have different types of conductivity, and wherein the second doped semiconductor layer is a topmost doped semiconductor layer in the vertical structure LED element;
performing a micro-roughening process to an entire surface of the second doped semiconductor layer; and
performing a macro-roughening process to the entire surface of the second doped semiconductor layer.
12. The method of claim 11 , wherein the micro-roughening process includes an ion implantation process.
13. The method of claim 12 , wherein the ion implantation process includes implanting As, P, BF2, B, F, N, Sb, Xe, or combinations thereof.
14. The method of claim 12 , wherein the ion implantation process is performed at a sub-zero degree Celsius temperature.
15. The method of claim 11 , wherein the macro-roughening process includes an etching process.
16. The method of claim 11 , wherein:
the micro-roughening process is performed such that a surface of the second doped semiconductor layer has a first peak-to-valley difference;
the macro-roughening process is performed such that the surface of the second doped semiconductor layer has a second peak-to-valley difference; and
the second peak-to-valley difference is substantially greater than the first peak-to-valley difference.
17. A method, comprising:
providing a vertical structure LED element that includes a p-type semiconductor layer, a multiple-quantum well (MQW) disposed over the p-type semiconductor layer, and an n-type semiconductor layer disposed over the MQW, wherein the n-type semiconductor layer is a topmost semiconductor layer;
performing a micro-roughening process to an entire exposed surface of the n-type semiconductor layer, wherein the micro-roughening process causes the entire exposed surface of the n-type semiconductor layer to have a first peak-to-valley difference less than about 100 nanometers; and
performing a macro-roughening process to the entire exposed surface of the n-type semiconductor layer, wherein the macro-roughening process causes the entire exposed surface of the n-type semiconductor layer to have a second peak-to-valley difference in a range from about 0.5 microns to about 1 micron.
18. The method of claim 17 , wherein the micro-roughening process includes implanting ions to the n-type semiconductor layer.
19. The method of claim 18 , wherein the implanting of the ions includes implanting As, P, BF2, B, F, N, Sb, Xe, or combinations thereof as ions, and wherein the implanting of the ions is performed at less than zero degrees Celsius.
20. The method of claim 17 , wherein the macro-roughening process includes etching the n-type semiconductor layer.