Resist pattern formating method
View Patent ↗The present invention provides a pattern formation method capable of preventing formation of surface defects. In the method, a resist surface after subjected to exposure is coated with an acidic film and then subjected to heating treatment. This method is suitably adopted in a process employing liquid immersion lithography and/or light of short wavelength, such as ArF excimer laser beams, for producing a very fine pattern.
1. A pattern formation method, comprising the steps of:
applying a resist composition onto a substrate, to form a resist film;
subjecting said resist film to exposure;
coating said resist film with an acidic film-forming composition containing a polymer and a solvent that does not dissolve said resist film, so that said resist film after exposure is covered with an acidic film;
heating said resist film; and then
developing said resist film with a developing solution; wherein the polymer is selected from a group consisting of polymethacryllic acid, polymaleic acid and polystyrenesulfonic acid, and wherein the exposure for pattern formation is carried out by the use of electron beams or extreme ultraviolet light.
2. The pattern formation method according to claim 1 , wherein said exposure is carried out in the manner of liquid immersion exposure.
3. The pattern formation method according to claim 1 , wherein said acidic film-forming composition has a pH value of 0.5 to 6.5.
4. A semiconductor device comprising a pattern formed by the method according to claim 1 .
5. The pattern formation method according to claim 1 , wherein said acidic film-forming composition has a pH value of 1.4 to 2.7.
6. The pattern formation method according to claim 1 , wherein said exposure is carried out with 193 nm radiation.
7. The pattern formation method according to claim 1 , wherein said exposure is carried out with 193 nm immersion exposure process.
8. The pattern formation method according to claim 1 , wherein the acidic film-forming composition further comprises an acidic compound.
9. The pattern formation method according to claim 1 , wherein the polymer is acidic.
10. The pattern formation method according to claim 1 , wherein the acidic film-forming composition further comprises an organic acid.
11. The pattern formation method according to claim 1 , wherein the acidic film-forming composition further comprises an acid selected from alkylcarboxylic acid, alkylsulfonic acid, fluorinated alkylsulfonic acid, and alkylbenzenesulfonic acid.
12. The pattern formation method according to claim 9 , further comprising an acid selected from alkylcarboxylic acid, alkylsulfonic acid, fluorinated alkylsulfonic acid, and alkylbenzenesulfonic acid.
13. The pattern formation method according to claim 1 , wherein the solvent is water.
14. The pattern formation method according to claim 13 , wherein the composition further comprises a solvent selected from methanol, ethanol and propanol.