Positive-type photosensitive resin composition, method for producing resist pattern, semiconductor device, and electronic device
View Patent ↗The positive tone photosensitive composition of the invention comprises an alkali-soluble resin having a phenolic hydroxyl group, a compound producing an acid by light, a thermal crosslinking agent and an acrylic resin. It is possible to provide a positive tone photosensitive composition that can be developed with an aqueous alkali solution, has sufficiently high sensitivity and resolution, and can form a resist pattern with excellent adhesiveness and thermal shock resistance.
1. A positive tone photosensitive composition, comprising:
an alkali-soluble resin having a phenolic hydroxyl group,
a compound producing an acid by light,
a thermal crosslinking agent and
an acrylic resin.
2. The positive tone photosensitive composition according to claim 1 , wherein the alkali-soluble resin having a phenolic hydroxyl group is a phenol resin.
3. The positive tone photosensitive composition according to claim 1 , wherein the alkali-soluble resin having a phenolic hydroxyl group contains a phenol resin having no unsaturated hydrocarbon group and a modified phenol resin having an unsaturated hydrocarbon group.
4. The positive tone photosensitive composition according to claim 3 , wherein the modified phenol resin having an unsaturated hydrocarbon group is further modified by reaction between a phenolic hydroxyl group and a polybasic acid anhydride.
5. The positive tone photosensitive composition according to claim 3 , wherein the modified phenol resin having an unsaturated hydrocarbon group is a phenol resin modified by a compound having a C4-C100 unsaturated hydrocarbon group.
6. The positive tone photosensitive composition according to claim 3 , wherein the ratio M A1 /M A2 of the mass M A1 of the phenol resin having no unsaturated hydrocarbon group and the mass M A2 of the modified phenol resin having an unsaturated hydrocarbon group is 5/95-95/5.
7. The positive tone photosensitive composition according to claim 1 , wherein the compound producing an acid by light is an o-quinonediazide compound.
8. The positive tone photosensitive composition according to claim 1 , wherein the content of the compound producing an acid by light is 3-100 parts by mass with respect to 100 parts by mass as the content of the alkali-soluble resin having a phenolic hydroxyl group.
9. The positive tone photosensitive composition according to claim 1 , wherein the acrylic resin is an acrylic resin having one or more structural units represented by the following formulas (1)-(3):
wherein R 1 represents hydrogen atom or a methyl group, R 2 represents a C4-C20 alkyl group, and R 3 represents a monovalent organic group having a primary, secondary or tertiary amino group.
10. The positive tone photosensitive composition according to claim 9 , wherein the acrylic resin is one having a structural unit represented by formula (1) and a structural unit represented by formula (2).
11. The positive tone photosensitive composition according to claim 9 , wherein the acrylic resin is one having a structural unit represented by formula (1), a structural unit represented by formula (2) and a structural unit represented by formula (3).
12. The positive tone photosensitive composition according to claim 1 , further comprising a compound producing an acid by heat.
13. The positive tone photosensitive composition according to claim 12 , wherein the compound producing an acid by heat has a structure represented by the following formula (4):
wherein R 4 , R 5 and R 6 each independently represents an alkyl group or aryl group, and R 7 represents hydrogen atom or fluorine atom.
14. The positive tone photosensitive composition according to claim 1 , further comprising an elastomer.
15. A method for producing a resist pattern comprising:
a step of exposing a photosensitive resin film formed using a positive tone photosensitive composition according to claim 1 ,
a step of developing the exposed photosensitive resin film with an aqueous alkali solution to obtain a patterned photosensitive resin film, and
a step of heating the patterned photosensitive resin film.
16. The method for producing a resist pattern according to claim 15 , wherein the step of heating is a step of heating the patterned photosensitive resin film at not higher than 200° C.
17. A semiconductor device comprising a resist pattern formed by the method for producing a resist pattern according to claim 15 , as an interlayer insulating film or surface protective layer.
18. A semiconductor device comprising a resist pattern formed by the method for producing a resist pattern according to claim 15 , as a cover coat layer.
19. A semiconductor device comprising a resist pattern formed by the method for producing a resist pattern according to claim 15 , as a core for a redistribution layer.
20. A semiconductor device comprising a resist pattern formed by the method for producing a resist pattern according to claim 15 , as a collar to hold a conductive ball serving as an external connecting terminal.
21. A semiconductor device comprising a resist pattern formed by the method for producing a resist pattern according to claim 15 , as an underfill.
22. A semiconductor device comprising a resist pattern formed by the method for producing a resist pattern according to claim 15 , as a surface protective layer and/or cover coat layer for a redistribution layer.
23. An electronic device comprising a semiconductor device according to claim 17 .
24. An electronic device comprising a semiconductor device according to claim 18 .
25. An electronic device comprising a semiconductor device according to claim 19 .
26. An electronic device comprising a semiconductor device according to claim 20 .
27. An electronic device comprising a semiconductor device according to claim 21 .
28. An electronic device comprising a semiconductor device according to claim 22 .