Micro-electrode array package using liquid crystal polymer and manufacturing method thereof
Disclosed herein is a micro-electrode array package including a micro-electrode array comprising: a substrate section including a liquid crystal polymer; an electrode section collecting and transferring bio-signals; and a cover section insulating and protecting the electrode section and including a liquid crystal polymer, wherein the electrode section is disposed in contact with one surface of the substrate section, the cover section is adhered in contact with the surface of the substrate section on which the electrode section is disposed, and a space independent from the external environment is formed between the substrate section and the cover section adhered thereto. Disclosed herein too is a method for manufacturing a micro-electrode array package, including: forming alignment holes in a substrate section including a liquid crystal polymer and a cover section including a liquid crystal polymer; forming site window holes for an electrode section-exposure in the cover section; forming an electrode section on one surface of the substrate section; aligning the substrate section and the cover section by the alignment holes, and adhering the substrate section and the cover section with each other; and cutting the substrate section and the cover section adhered thereto to provide an outer shape.
1. A method for manufacturing a micro-electrode array package using a liquid crystal polymer, comprising:
forming alignment holes in a substrate section including a first liquid crystal polymer and in a cover section including a second liquid crystal polymer;
molding the cover section to form a curved shape;
forming site window holes for an electrode section-exposure in the cover section;
forming an electrode section on a surface of the substrate section, the electrode section extending along at least a portion of the surface of the substrate section;
aligning the substrate section and the cover section using the alignment holes, and adhering the substrate section and the cover section with each other; and
cutting the substrate section and the cover section adhered thereto to provide an outer shape.
2. The method for manufacturing a micro-electrode array package according to claim 1 , wherein forming the alignment holes, forming the site window holes for the electrode section-exposure, adhering the substrate section and the cover section, and cutting the substrate section and the cover section to provide the outer shape are carried out by laser processing.
3. The method for manufacturing a micro-electrode array package according to claim 1 , wherein the cover section has a higher melting temperature than the substrate section and the cover section and the substrate section are adhered to each other by the difference between the melting temperature of the substrate section and the melting temperature of the cover section.
4. The method for manufacturing a micro-electrode array package according to claim 1 , wherein the molded cover section secures a space independent from the external environment between the cover section and the substrate section.
5. The method for manufacturing a micro-electrode array package according to claim 4 , wherein molding the cover section includes molding the cover section by heat press processing.
6. The method for manufacturing a micro-electrode array package according to claim 4 , which further comprises disposing a functioning section for generating/processing signals and transmitting/receiving signals in the space, so that the functioning section is not affected by the external environment.
7. The method for manufacturing a micro-electrode array package according to claim 1 , wherein adhering the substrate section and the cover section with each other includes disposing a press pad section in contact with another surface of the substrate section having no electrode section.
8. The method for manufacturing a micro-electrode array package according to claim 7 , wherein the press pad section has 3-dimensional surface morphology so that different amounts of pressures are applied to different positions of the substrate sections during a thermal-bonding process.