Converting metal mask to metal-oxide etch stop layer and related semiconductor structure
View Patent ↗A method includes providing a semiconductor structure including a plurality of devices; depositing a nitride cap over the semiconductor structure; forming an aluminum mask over the nitride cap, the aluminum mask including a plurality of first openings; converting the aluminum mask to an aluminum oxide etch stop layer; and performing middle-of-line fabrication processing, leaving the aluminum oxide etch stop layer in place. A semiconductor structure includes a plurality of devices on a substrate; a nitride cap over the plurality of devices; an aluminum oxide etch stop layer over the nitride cap; an inter-level dielectric (ILD) over the aluminum oxide etch stop layer; and a plurality of contacts extending through the ILD, the aluminum oxide etch stop layer and the nitride cap to the plurality of devices.
1. A method comprising:
providing a semiconductor structure including a plurality of devices;
depositing a nitride cap over the semiconductor structure;
forming an aluminum mask over the nitride cap, the aluminum mask including a plurality of first openings;
converting only a top portion of the aluminum mask to an aluminum oxide etch stop layer; and
performing middle-of-line fabrication processing, leaving the aluminum oxide etch stop layer in place.
2. The method of claim 1 , wherein the aluminum mask has a thickness in a range of approximately 2 to 15 nanometers.
3. The method of claim 1 , wherein the performing middle-of-line fabrication processing includes:
depositing an inter-level dielectric (ILD) over the aluminum oxide etch stop layer; and
forming contacts to the plurality of devices inside the ILD.
4. The method of claim 3 , wherein the forming contacts includes;
forming a plurality of second openings through the ILD substantially aligned with the plurality of first openings in the aluminum oxide etch stop layer and through the nitride cap to the plurality of devices; and
depositing a metal in the plurality of first and second openings.
5. The method of claim 4 , wherein the forming the plurality of second openings includes:
depositing and patterning a photoresist over the ILD to form a photomask; and
performing a reactive ion etch through the ILD and the nitride cap to the plurality of devices using the photomask.
6. The method of claim 3 , wherein the aluminum oxide etch stop layer retains a critical dimension of the plurality of first openings during the plurality of second openings forming.
7. The method of claim 3 , wherein at least one contact extends laterally over a portion of the aluminum oxide etch stop layer and through an opening in the aluminum oxide etch stop layer.
8. The method of claim 1 , wherein the converting the aluminum includes oxidizing the aluminum mask.
9. The method of claim 8 , wherein the oxidizing includes using one of an oxidation plasma and exposure to an oxidizing slurry.
10. A method comprising:
providing a semiconductor structure including;
a dielectric layer; and
a plurality of gates formed within the dielectric layer;
depositing a nitride cap directly over the dielectric layer of the semiconductor structure;
forming a metal mask over the nitride cap, the metal mask including a plurality of first openings;
converting the metal mask to an insulative etch stop layer; and
performing middle-of-line fabrication processing,
wherein the insulative etch stop layer remains in place in a final semiconductor product.
11. The method of claim 10 , wherein the metal mask includes aluminum, and the converting includes oxidizing to convert the aluminum into the insulative etch stop layer including aluminum oxide.
12. The method of claim 10 , wherein the metal mask has a thickness in a range of approximately 2 to 15 nanometers.
13. The method of claim 10 , wherein the performing middle-of-line fabrication processing includes:
depositing an inter-level dielectric (ILD) over the insulative etch stop layer; and
forming contacts to the plurality of devices through the ILD.
14. The method of claim 13 , wherein the forming contacts includes;
forming a plurality of second openings through the ILD substantially aligned with the plurality of first openings in the insulative etch stop layer and through the nitride cap to the plurality of devices; and
depositing a metal in the plurality of first and second openings.
15. The method of claim 14 , wherein the insulative etch stop layer retains a critical dimension of the plurality of first openings during the plurality of second openings forming.
16. The method of claim 10 , wherein at least one contact extends laterally over a portion of the insulative etch stop layer and through an opening in the insulative etch stop layer.
17. The method of claim 10 , wherein the oxidizing includes using one of an oxidation plasma and exposure to an oxidizing slurry.