Packaged microelectronic devices and methods for manufacturing packaged microelectronic devices
View Patent ↗Packaged microelectronic devices and methods for manufacturing packaged microelectronic devices are disclosed. In one embodiment, a method for forming a microelectronic device includes attaching a microelectronic die to a support member by forming an attachment feature on at least one of a back side of the microelectronic die and the support member. The attachment feature includes a volume of solder material. The method also includes contacting the attachment feature with the other of the microelectronic die and the support member, and reflowing the solder material to join the back side of the die and the support member via the attachment feature. In several embodiments, the attachment feature is not electrically connected to internal active structures of the die.
1. A packaged microelectronic device, comprising:
a support member comprising a first side, a second side opposite the first side, a plurality of support member terminals at the first side, and a plurality of contact pads at the second side and electrically coupled to corresponding support member terminals;
a microelectronic die having a front side and a back side opposite the front side, wherein the back side is facing the support member, and the microelectronic die includes a plurality of terminals at the front side of the die and electrically coupled to corresponding support member terminals with a plurality of wire bonds; and
an attachment feature between the support member and the back side of the microelectronic die and attached to each of the support member and the microelectronic die, wherein the attachment feature is composed of a solder material, and wherein the attachment feature includes at least one of (a) a single, unitary structure covering at least approximately all of the back side of the die, and (b) a feature not electrically connected to internal active structures of the microelectronic die.
2. The device of claim 1 wherein the microelectronic die further comprises a conductive layer at the back side of the die and in contact with the attachment feature.
3. The device of claim 2 wherein:
the attachment feature comprises a plurality of pre-formed solder balls arranged in an array on the support member; and
the conductive layer comprises a plurality of solder bumps at the back side of the die and arranged in a pattern corresponding at least in part to the arrangement of solder balls, and wherein the solder bumps are attached to corresponding solder balls.
4. The device of claim 1 wherein the attachment feature comprises a layer of solder material having a generally uniform thickness between the support member and the microelectronic die.
5. The device of claim 4 wherein the microelectronic die is electrically coupled to a grounding feature of the support member via the attachment feature.
6. The device of claim 1 wherein the attachment feature comprises a plurality of pre-formed solder balls between the support member and the microelectronic die.
7. The device of claim 1 wherein the attachment feature is not electrically connected to internal active structures of the support member.
8. The system of claim 1 wherein the microelectronic die comprises one of a processor, a memory device, an imager, a filter, or a sensor.
9. The device of claim 1 wherein the support member comprises an interposer substrate.
10. The device of claim 1 wherein the attachment feature is composed of a lead-free solder material.
11. The device of claim 1 wherein the attachment feature is composed of SnAgCu, SnAg, or SnAu solder.
12. The device of claim 1 wherein the attachment feature comprises a unitary, generally-rigid component between the die and the support member, and wherein the attachment feature is positioned to provide generally consistent stress distribution within the device.