IP Library Granted Patent US 8,605,146
Granted Patent B2
US 8,605,146 · App. 13/171,105 · Granted Dec 10, 2013

Apparatus for optically inspecting an at least partially reflecting surface of an object

Inventors: Klaus-Georg Knupfer (Essingen, DE); Joachim Reimann (Bad Boll, DE); Volker Huss (Süssen, DE); Volker Schöllkopf (Bad Boll, DE)
Assignee: Carl Zeiss OIM GmbH
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Quick Facts
Patent No.
US 8,605,146
App. No.
13/171,105
Granted
Dec 10, 2013
Kind
B2
Abstract

An apparatus for optically inspecting an at least partially reflecting surface of an object includes first and second transverse carriers ( 12, 14 ) defining respective substantially circular segment-shaped cutouts ( 32 ). The transverse carriers ( 12, 14 ) are disposed at a longitudinal distance (D) from one another and the longitudinal distance (D) defines a longitudinal direction ( 17 ). A plurality of longitudinal members are configured to hold the first and second transverse carriers at the longitudinal distance (D). The longitudinal members are arranged at a defined radial distance to the circular segment-shaped cutouts. A translucent diffusing screen is held in the circular segment-shaped cutouts by the transverse carriers to form a tunnel-shaped inspection space. A multiplicity of light sources are arranged outside of the tunnel-shaped inspection space behind the diffusing screen. The light sources are configured to be controlled individually or in small groups to generate variable light-dark patterns on the diffusing screen. A workpiece receptacle is configured for accommodating the object in the tunnel-shaped inspection space. At least one camera is directed into the tunnel-shaped inspection space. An evaluation and control unit is configured to control the light sources and the camera to generate various light-dark patterns on the diffusing screen and to record and evaluate a plurality of images of the object in dependence on the light-dark patterns.

Claims (37)

1. An apparatus for optically inspecting an at least partially reflecting surface of an object, the apparatus comprising:

first and second transverse carriers defining respective substantially circular segment-shaped cutouts;

said first and second transverse carriers being arranged at a longitudinal distance (D) from each other and said longitudinal distance defining a longitudinal direction;

a plurality of longitudinal members configured to hold said first and second transverse carriers at said longitudinal distance (D);

said longitudinal members being arranged at a defined radial distance to said circular segment-shaped cutouts;

a translucent diffusing screen which is held in said circular segment-shaped cutouts by said transverse carriers to form a tunnel-shaped inspection space;

a multiplicity of light sources arranged outside of said tunnel-shaped inspection space between said longitudinal members and said diffusing screen;

said light sources being configured to be controlled individually or in small groups to generate variable light-dark patterns on said diffusing screen;

wherein said longitudinal members and said diffusing screen form a substantially closed enclosure for providing a cooling air flow past said light sources;

a workpiece receptacle configured for accommodating the object in said tunnel-shaped inspection space;

at least one camera which is directed into the tunnel-shaped inspection space; and,

an evaluation and control unit configured to control said light sources and said camera to generate different ones of said light-dark patterns on said diffusing screen and to record and evaluate a plurality of images of said object in dependence on said light-dark patterns.

2. The apparatus of claim 1 , further comprising:

a plurality of identical light modules arranged between said diffusing screen and said longitudinal members; and,

each of said light modules including a plurality of said multiplicity of light sources.

3. The apparatus of claim 2 , wherein:

said light modules each have a metallic carrier body having a length (L-L′) which is approximately equal to said longitudinal distance (D); and,

said carrier body has a front side on which said plurality of light modules are arranged and a back side on which cooling ribs are formed.

4. The apparatus of claim 2 , wherein said light modules are floatingly mounted on said transverse carriers.

5. The apparatus of claim 2 , wherein:

each of said light modules has two pairs of columns of light sources which are parallel in the longitudinal direction; and,

said pairs of columns are configured to be individually controlled.

6. The apparatus of claim 1 , wherein said light sources are each mounted at the same radial distance to said diffusing screen.

7. The apparatus of claim 1 , wherein said diffusing screen comprises a diffusively scattering ground material.

8. The apparatus of claim 1 , wherein said diffusing screen is floatingly mounted on said transverse carriers.

9. The apparatus of claim 1 , wherein said transverse carriers have holding clamps configured to exchangeably fix said diffusing screen.

10. The apparatus of claim 1 , further comprising a plurality of fans arranged on said longitudinal members.

11. The apparatus of claim 1 , wherein said substantially closed enclosure is arranged approximately concentrically to said diffusing screen.

12. The apparatus of claim 1 , wherein said transverse carriers are arranged vertically above one another.

13. The apparatus of claim 1 , further comprising:

a transverse beam arranged in said longitudinal direction and mounted outside of said tunnel-shaped inspection space; and,

at least one camera mounted on said transverse beam.

14. The apparatus of claim 1 , wherein said camera defines an optical axis which is arranged substantially perpendicular to said longitudinal direction.

15. The apparatus of claim 1 , further comprising:

a closure plate configured to close said tunnel-shaped inspection space in said longitudinal direction; and,

said closing plate having an inner side facing toward said inspection space and being configured to generate a further pattern with light and dark regions.

16. The apparatus of claim 7 , wherein said diffusively scattering ground material is selected from the group consisting of an acrylic glass and a full-volume polytetrafluoroethylene (PTFE) material.

Assignments (4)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 2, 2024
From: CARL ZEISS AUTOMATED INSPECTION GMBH
To: CARL ZEISS INDUSTRIELLE MESSTECHNIK GMBH
Reel/Frame 069450/0036 →
CHANGE OF NAME Recorded Dec 2, 2024
From: CARL ZEISS OIM GMBH
To: CARL ZEISS AUTOMATED INSPECTION GMBH
Reel/Frame 069468/0871 →
CHANGE OF ADDRESS Recorded Dec 2, 2024
From: CARL ZEISS AUTOMATED INSPECTION GMBH
To: CARL ZEISS AUTOMATED INSPECTION GMBH
Reel/Frame 069468/0899 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 21, 2011
From: KNUPFER, KLAUS-GEORG; REIMANN, JOACHIM; HUSS, VOLKER; SCHOELLKOPF, VOLKER
To: CARL ZEISS OIM GMBH
Reel/Frame 027083/0393 →
Priority Claims (1)
DE 10 2008 064 562 · Dec 29, 2008 · national
Continuity (2)
Continuation PCTDE2009001812 · Dec 23, 2009
Related Publication 20110310242A1 · Dec 22, 2011