Scanning electron microscope
View Patent ↗A scanning electron microscope having a charged particle beam that when in a state being irradiated toward a sample, a voltage is applied to the sample so that the charged particle beam does not reach the sample. The scanning electron microscope also detects information on a potential of a sample using a signal obtained, and a device for automatically adjusting conditions based on the result of measuring.
1. A scanning electron microscope comprising:
a deflector for scanning an electron beam,
an objective lens for focusing the electron beam,
a detector for detecting electrons obtained by scanning a sample with the electron beam and
a control device for adjusting a condition of the objective lens, and adjusting a negative voltage applied to a sample to control energy of an electron beam reaching the sample,
wherein the control device controls the objective lens as an objective point of the objective lens is located at an arrival position of electrons emitted from the sample on the detector, and applies the negative voltage to the sample so as to reflect the electron beam without reaching the sample by an electric field formed by the applied negative voltage.
2. The scanning electron microscope as set forth in claim 1 , wherein the detector is disposed between the deflector for scanning the electron beam and the objective lens.
3. The scanning electron microscope as set forth in claim 1 , wherein the detector is composed of a plurality of detecting elements to be arranged two-dimensionally.
4. A scanning electron microscope comprising:
a deflector for moving a scanning area of the electron beam,
a lens for focusing the electron beam,
a detector for detecting electrons obtained by scanning a sample with the electron beam and
a control device for adjusting the deflector and adjusting a negative voltage applied to a sample to control energy of an electron beam reaching the sample, wherein the control device:
applies the negative voltage to the sample so as to reflect the electron beam without reaching the sample by an electric field formed by the applied negative voltage,
detects a deviation between a reference signal and detected signal in a state of the electron beam which does not reach the sample, and
controls the deflector based on the detected deviation.
5. The scanning electron microscope as set forth in claim 4 , wherein the detector is disposed between the deflector for scanning the electron beam and the objective lens.
6. The scanning electron microscope as set forth in claim 4 , wherein the detector is composed of a plurality of detecting elements to be arranged two-dimensionally.
7. A scanning electron microscope comprising a deflector for scanning an electron beam, a lens for focusing the electron beam and a detector for detecting electrons obtained by scanning a sample with the electron beam and a control device for adjusting a negative voltage applied to a sample to control energy of an electron beam reaching the sample, wherein the control device:
applies the negative voltage to the sample so as to reflect the electron beam without reaching the sample by an electric field formed by the applied negative voltage,
detects a deviation from a reference signal of detected signal affected by a structure which exists on a trajectory of the reflected electrons within the scanning electron microscope, without the electron beam reaching the sample, and
detects an electrical potential based on detected deviation.
8. The scanning electron microscope as set forth in claim 7 , wherein the detector is disposed between the deflector for scanning the electron beam and the objective lens.
9. The scanning electron microscope as set forth in claim 7 , wherein the detector is composed of a plurality of detecting elements to be arranged two-dimensionally.
10. The scanning electron-microscope as set forth in claim 7 , wherein the control device controls the objective lens as changing an open angle of the electron beam, when the electrical potential is measured.
11. The scanning electron microscope as set forth in claim 7 , wherein the control device makes a deflection fulcrum of the deflector vary synchronizing with variation in the negative voltage applied to the sample in measuring the potential of the sample.