Relaxation and transfer of strained material layers
View Patent ↗A method for the formation of an at least partially relaxed strained material layer, comprises providing a seed substrate; patterning the seed substrate; growing a strained material layer on the patterned seed substrate; transferring the strained material layer from the patterned seed substrate to an intermediate substrate; and at least partially relaxing the strained material layer by a heat treatment.
1. A method for forming an at least partially relaxed strained material layer, the method comprising:
patterning a seed substrate by etching the seed substrate and forming seed substrate islands separated by recesses;
growing a strained material layer on the patterned seed substrate;
transferring the strained material layer from the patterned seed substrate to an intermediate substrate, transferring the strained material layer including:
depositing a low-viscosity compliant layer on the strained material layer; and
bonding the low-viscosity compliant layer to the intermediate substrate;
forming islands of the strained material layer; and
at least partially relaxing the islands of the strained material layer by a heat treatment after transferring the strained material layer from the patterned seed substrate to the intermediate substrate.
2. The method of claim 1 , wherein transferring the strained material layer from the patterned seed substrate to the intermediate substrate comprises:
implanting ions in the patterned seed substrate below the strained material layer to form a weakened layer; and
detaching the strained material layer from the patterned seed substrate at the weakened layer by heat treatment.
3. The method of claim 1 , wherein transferring the strained material layer from the patterned seed substrate to the intermediate substrate comprises:
implanting ions in the strained material layer to form a weakened layer; and
detaching the strained material layer from the patterned seed substrate at the weakened layer by heat treatment.
4. The method of claim 1 , wherein transferring the strained material layer from the patterned seed substrate to the intermediate substrate comprises removing the patterned seed substrate using at least one of an electromagnetic irradiation process, a grinding process, a mechanical polishing process and an etching process.
5. The method of claim 1 , further comprising growing at least one buffer layer prior to growing the strained material layer on the patterned seed substrate.
6. The method of claim 1 , further comprising selecting the low-viscosity layer to comprise borophosphosilicate glass.
7. The method of claim 1 , further comprising transferring the at least partially relaxed islands of the strained material layer to a target substrate.
8. The method of claim 1 , further comprising selecting at least one of the seed substrate and the intermediate substrate to comprise sapphire or silicon.
9. The method of claim 1 , wherein growing the strained material layer further comprises growing an InGaN or GaN strained material layer.
10. The method of claim 9 , wherein growing an InGaN or GaN strained material layer comprises growing an InGaN layer including at least 3% In.
11. The method of claim 7 , further comprising removing the intermediate substrate using at least one of an etching process, a mechanical polishing process, a grinding process, and an electromagnetic irradiation process.
12. The method of claim 1 , further comprising transferring the at least partially relaxed islands of the strained material layer to a target substrate by depositing a high-viscosity layer on the at least partially relaxed islands of the strained material layer and bonding the high-viscosity layer to the target substrate.
13. A method for manufacturing a semiconductor device, comprising:
patterning a seed substrate by etching the seed substrate and forming seed substrate islands separated by recesses;
growing a strained material layer on the patterned seed substrate;
transferring the strained material layer from the patterned seed substrate to an intermediate substrate, transferring the strained material layer including:
depositing a low-viscosity compliant layer on the strained material layer; and
bonding the low-viscosity compliant layer to the intermediate substrate;
forming islands of the strained material layer;
at least partially relaxing the islands of the strained material layer by a heat treatment after transferring the strained material layer from the patterned seed substrate to the intermediate substrate;
transferring the at least partially relaxed islands of the strained material layer to a target substrate; and
epitaxially growing at least one material layer on the transferred at least partially relaxed islands of the strained material layer.
14. The method of claim 1 , further comprising forming islands of the low-viscosity compliant layer disposed between the islands of the strained material layer and the intermediate substrate prior to at least partially relaxing the islands of the strained material layer.
15. The method of claim 13 , further comprising forming islands of the low-viscosity compliant layer disposed between the islands of the strained material layer and the intermediate substrate prior to at least partially relaxing the islands of the strained material layer.