Abrading agent and abrading method
View Patent ↗A polishing agent which comprises a composition containing an inorganic acid, an amino acid, a protective film-forming agent, an abrasive, an oxidizing agent, an organic acid and water, adjusted to a pH of 1.5-4, wherein the amount of potassium hydroxide required to raise the pH of the composition without the organic acid to 4 is at least 0.10 mol with respect to 1 kg of the composition without the organic acid, and the organic acid contains at least two carboxyl groups, wherein the logarithm of the inverse of the first acid dissociation constant (pKa1) is no greater than 3.
1. A polishing agent for copper which comprises a composition containing an inorganic acid, an amino acid, a protective film-forming agent, an abrasive, an oxidizing agent, an organic acid and water, adjusted to a pH of 1.5-4, wherein:
the amount of potassium hydroxide required to raise the pH of the composition without the organic acid to 4 is at least 0.10 mol with respect to 1kg of the composition without the organic acid, and
the organic acid contains at least two carboxyl groups, wherein the logarithm of the inverse of the first acid dissociation constant (pKa1) is no greater than 3; “wherein the protective film-forming agent is at least one protective film-forming agent selected from the group consisting of benzotriazole and its derivatives”.
2. A polishing agent according to claim 1 , wherein the organic acid is one or more organic acids selected from the group consisting of oxalic acid, maleic acid and malonic acid.
3. A polishing agent according to claim 1 , wherein the inorganic acid includes one or more selected from among sulfuric acid and phosphoric acid.
4. A polishing agent according to claim 1 , wherein the inorganic acid includes sulfuric acid and phosphoric acid.
5. A polishing agent according to claim 1 , wherein the inorganic acid consists of sulfuric acid and phosphoric acid.
6. A polishing agent according to claim 1 , wherein the pKa1 of the amino acid is 2-3.
7. A polishing agent according to claim 1 , wherein the abrasive is colloidal silica and/or colloidal alumina having a mean particle size of no greater than 100 nm.
8. A polishing agent according to claim 1 , wherein the oxidizing agent is at least one oxidizing agent selected from the group consisting of hydrogen peroxide, persulfuric acid and persulfuric acid salts.
9. A polishing method comprising a lamination step in which a copper-containing metal film is laminated on a substrate, and a polishing step in which a polishing agent according to claim 1 is used for polishing of the copper-containing metal film to remove a portion of the metal film.
10. The polishing method according to claim 9 , wherein the maximum thickness of the metal film is 5 μm or greater.
11. The polishing method according to claim 9 , wherein the maximum thickness of the metal film is 10 μm or greater.
12. The polishing method according to claim 9 , wherein the polishing speed for polishing of the metal film in the polishing step is 5 μm/min or greater.
13. The polishing method according to claim 9 , wherein the metal film is a copper film.