Pattern measurement apparatus
It is the object of the present invention to provide a pattern measurement apparatus which suitably evaluates a pattern formed by a double patterning method prior to a transfer using masks or which suitably evaluates a deviation of patterns formed by the double patterning method. To achieve the object, a pattern measurement apparatus is proposed which performs an exposure simulation on data about contour lines obtained by converting the pattern edges of first and mask images formed based on charged-particle beam irradiation of the two masks used for subsequent double exposure and which overlaps two exposure-simulated contour lines based on the coordinate information of design data about the masks. Furthermore, a pattern dimension measuring apparatus is proposed which sets measurement conditions using a charged-particle beam based on the positional information about parts or portions separated for double exposure.
1. A pattern dimension measuring apparatus for measuring a pattern on a sample based on information obtained based on charged-particle beam irradiation of the sample, said pattern dimension measuring apparatus comprising:
a storage medium for storing design data about a photomask subjected to double exposure; and
an arithmetic unit for causing two sets of information obtained by exposure simulations performed respectively on first photomask image information and second photomask image information to be overlapped based on positional information about the pattern possessed by the design data, the first photomask image information and second photomask image information being obtained by the charged-particle beam irradiation of first and second photomasks split for the double exposure.
2. The pattern dimension measuring apparatus of claim 1 , wherein the first photomask image information and second photomask image information are obtained by converting pattern edges of charged-particle beam images of the first photomask image and second photomask image into contour lines.
3. The pattern dimension measuring apparatus of claim 1 , wherein the arithmetic unit measures dimensions of patterns on the overlapped first photomask image information and second photomask image information.
4. A pattern dimension measuring apparatus for measuring a pattern on a sample based on information obtained based on charged-particle beam irradiation of the sample, the pattern dimension measuring apparatus comprising:
a storage medium for storing design data about a photomask subjected to double exposure; and
a recipe setting portion for setting conditions under which the sample is irradiated with a charged-particle beam, the recipe setting portion operating to set positions at which the pattern dimensions are measured, based on positional information regarding a portion at which a first photomask and a second photomask that are split for the double exposure are separated.