Method of manufacturing a semiconductor device
A method for fabricating a semiconductor device is disclosed. An exemplary method includes a providing substrate. A dielectric layer is formed over the semiconductor substrate and a stop layer is formed over the dielectric layer. The stop layer and the dielectric layer comprise a different material. The method further includes forming a patterned hard mask layer over the stop layer and etching the semiconductor substrate through the patterned hard mask layer to form a plurality of trenches. The method also includes depositing an isolation material on the semiconductor substrate and substantially filling the plurality of trenches. Thereafter, performing a CMP process on the semiconductor substrate, wherein the CMP process stops on the stop layer.
1. A method comprising:
forming a dielectric layer over a semiconductor substrate;
forming a stop layer over and in physical contact with the dielectric layer, wherein the stop layer and the dielectric layer comprise a different material;
forming a patterned hard mask layer over the stop layer;
etching the semiconductor substrate through the patterned hard mask layer to form a plurality of trenches;
depositing an isolation material on the semiconductor substrate and substantially filling the plurality of trenches; and
performing a planarizing process on the semiconductor substrate thereby removing at least a portion of the patterned hard mask layer and at least a portion of the isolation material, wherein the planarizing process stops on the stop layer, and
partially removing the isolation material within the plurality of trenches such that a top most surface of the isolation material is below a top most surface of the dielectric layer.
2. The method of claim 1 wherein the stop layer and the hard mask layer include a different material, and wherein the hard mask layer and the isolation material include the same material.
3. The method of claim 1 wherein the dielectric layer includes silicon oxide.
4. The method of claim 1 wherein the stop layer includes silicon nitride.
5. The method of claim 1 wherein the hard mask layer includes silicon oxide.
6. The method of claim 1 wherein the isolation material includes silicon oxide.
7. A method of forming a semiconductor device, comprising:
providing a semiconductor substrate;
forming a dielectric layer over the semiconductor substrate;
forming a stop layer over the dielectric layer;
forming a hard mask layer over the stop layer, wherein the hard mask layer comprises a first material layer and a second material layer, the first material layer being formed over the stop layer and the second material layer being formed over the first material layer, and wherein the first material layer and the second material layer comprise a different material;
forming a plurality of trenches in the semiconductor substrate using the hard mask layer to define the area to be trenched;
depositing an isolation material on the semiconductor substrate and substantially filling the plurality of trenches;
thereafter, performing a first CMP process on the semiconductor device;
thereafter, removing the second material layer of the hard mask layer; and
thereafter, performing a second CMP process on the semiconductor device.
8. The method of claim 7 further comprising:
after removing the second material layer of the hard mask layer and before performing the second CMP process, forming another isolation material over the semiconductor substrate; and
after performing a second CMP process, partially removing the isolation material within the plurality of trenches.
9. The method of claim 7 wherein the stop layer and the dielectric layer comprise a different material.
10. The method of claim 7 wherein the first CMP process stops on the second material layer of the hard mask layer.
11. The method of claim 7 wherein the second CMP process stops on the stop layer.
12. The method of claim 7 wherein the first material layer of the hard mask layer comprises silicon oxide, and wherein the second material layer of the hard mask layer comprises silicon nitride.
13. The method of claim 7 wherein removing the second material layer of the hard mask layer includes performing a wet etching process.
14. The method of claim 7 wherein the plurality of trenches are formed by an etching process.
15. The method of claim 7 wherein the dielectric layer comprises silicon oxide.
16. The method of claim 7 wherein the stop layer comprises silicon nitride.
17. The method of claim 8 wherein the isolation material and the another isolation material comprise silicon oxide.
18. A method of forming a semiconductor device, comprising:
depositing a dielectric layer over a semiconductor substrate;
depositing a silicon nitride layer over the dielectric layer;
depositing a silicon oxide layer over the silicon nitride layer;
forming a plurality of isolation features in the semiconductor substrate, wherein forming the plurality of isolation features includes forming a plurality of trenches using the silicon oxide layer as a mask layer, and wherein forming the plurality of isolation features further includes depositing a trench-filling silicon oxide material over the semiconductor device and substantially filling the plurality of trenches;
performing a planarizing process that stops on the silicon nitride layer, wherein the planarizing process removes at least a portion of the silicon oxide layer and at least a portion of the trench-filling silicon oxide material disposed over the semiconductor device; and
partially removing at least a portion of the trench-filling silicon oxide material within the plurality of trenches such that a top most surface of the silicon oxide material is below a top most surface of the dielectric layer.
19. The method of claim 18 wherein forming the plurality of trenches includes a dry etching process,
wherein the planarizing process includes a CMP process,
wherein depositing a trench-filling silicon oxide material includes a CVD process, and
wherein partially removing the trench-filling silicon oxide material includes a dry etching process.