Radiation-sensitive resin composition, method for forming resist pattern and polymer
A radiation-sensitive resin composition includes (A) a polymer that includes a structural unit (I) including a group shown by the following formula (i), (B) a photoacid generator, and (C) a polymer that has a fluorine atom content lower than that of the polymer (A), and includes an acid-labile group. The polymer (A) preferably includes a structural unit shown by the following formula (1) as the structural unit (I). It is preferable that X in the formula (1) represent a divalent or trivalent chain-like hydrocarbon group or alicyclic hydrocarbon group.
1. A resin composition comprising a polymer comprising:
a structural unit (I) including a group shown by a formula (i); and
at least one structural unit selected from the group consisting of a structural unit (II) shown by a formula (2) and a structural unit (III) shown by a formula (3),
wherein a content of the structural unit (I) in the polymer is 10 to 90 mol % based on total structural units included in the polymer,
wherein R a represents a hydrogen atom, a halogen atom, a nitro group, —R a1 , —O—R a1 , —CO—R a1 , or —CO—O—R a1 , wherein R a1 represents a monovalent chain-like hydrocarbon group having 1 to 20 carbon atoms, a monovalent alicyclic hydrocarbon group having 3 to 20 carbon atoms, a monovalent aromatic hydrocarbon group having 6 to 30 carbon atoms, or a monovalent aromatic-aliphatic hydrocarbon group having 7 to 30 carbon atoms, R b represents a monovalent chain-like hydrocarbon group having 1 to 10 carbon atoms that includes at least one fluorine atom, or a monovalent alicyclic hydrocarbon group having 3 to 20 carbon atoms that includes at least one fluorine atom, provided that R b and R a may bond to each other to form a cyclic structure including at least one fluorine atom, and * indicates a bonding site, provided that a plurality of R a and a plurality of R b may respectively be either the same or different when n is 2 or 3,
wherein R represents a hydrogen atom, a methyl group, or a trifluoromethyl group, G represents a single bond, an oxygen atom, a sulfur atom, —CO—O—, —SO 2 —O—NH—, —CO—NH—, or —O—CO—NH—, R 1 represents a monovalent chain-like hydrocarbon group having 1 to 6 carbon atoms that includes at least one fluorine atom, or a monovalent alicyclic hydrocarbon group having 4 to 20 carbon atoms that includes at least one fluorine atom, R 2 represents an (m+1)-valent hydrocarbon group having 1 to 20 carbon atoms, provided that an oxygen atom, a sulfur atom, —NR′—, a carbonyl group, —CO—O—, or —CO—NH— may be bonded to an end of R 2 that is bonded to R 3 , wherein R′ represents a hydrogen atom or a monovalent organic group, R 3 represents a single bond, a divalent chain-like hydrocarbon group having 1 to 10 carbon atoms, or a divalent alicyclic hydrocarbon group having 4 to 20 carbon atoms, X 2 represents a divalent chain-like hydrocarbon group having 1 to 20 carbon atoms that includes at least one fluorine atom, A represents an oxygen atom, —NR″—, —CO—O—*, or —SO 2 —O—*, wherein R″ represents a hydrogen atom or a monovalent organic group and * indicates a bonding site bonded to R 4 , R 4 represents a hydrogen atom or a monovalent organic group, and m is an integer from 1 to 3, provided that a plurality of R 3 , a plurality of X 2 , a plurality of A, and a plurality of R 4 may respectively be either the same or different when m is 2 or 3.
2. The resin composition according to claim 1 , wherein the structural unit (I) is a structural unit (I-1) shown by a formula (1),
wherein R represents a hydrogen atom, a methyl group, or a trifluoromethyl group, X represents an (n+1)-valent linking group, R a and R b are the same as defined for the formula (1), and n is an integer from 1 to 3.
3. The resin composition according to claim 2 , wherein X in the formula (1) represents a divalent or trivalent chain-like hydrocarbon group or alicyclic hydrocarbon group, and n is 1 or 2.
4. The resin composition according to claim 1 , wherein R b in the formula (i) represents a trifluoromethyl group.
5. A method for forming a resist pattern comprising (1) forming a photoresist film on a substrate using the radiation-sensitive resin composition according to claim 1 , (2) providing an immersion liquid over the photoresist film, and subjecting the photoresist film to liquid immersion lithography via the immersion liquid, and (3) developing the photoresist film subjected to liquid immersion lithography to form a resist pattern.
6. A polymer comprising a structural unit (I) including a group shown by a formula (i), and at least one structural unit selected from the group consisting of a structural unit (II) shown by a formula (2) and a structural unit (III) shown by a formula (3),
wherein a content of the structural unit (I) in the polymer is 10 to 90 mol % based on total structural units included in the polymer,
wherein R a represents a hydrogen atom, a halogen atom, a nitro group, —R a1 , —O—R a1 , —CO—R a1 , or —CO—O—R a1 , wherein R a1 represents a monovalent chain-like hydrocarbon group having 1 to 20 carbon atoms, a monovalent alicyclic hydrocarbon group having 3 to 20 carbon atoms, a monovalent aromatic hydrocarbon group having 6 to 30 carbon atoms, or a monovalent aromatic-aliphatic hydrocarbon group having 7 to 30 carbon atoms, R b represents a monovalent chain-like hydrocarbon group having 1 to 10 carbon atoms that includes at least one fluorine atom, or a monovalent alicyclic hydrocarbon group having 3 to 20 carbon atoms that includes at least one fluorine atom, provided that R b and R a may bond to each other to form a cyclic structure including at least one fluorine atom, * indicates a bonding site, R represents a hydrogen atom, a methyl group, or a trifluoromethyl group, G represents a single bond, an oxygen atom, a sulfur atom, —CO—O—, —SO 2 —O—NH—, —CO—NH—, or —O—CO—NH—, R 1 represents a monovalent chain-like hydrocarbon group having 1 to 6 carbon atoms that includes at least one fluorine atom, or a monovalent alicyclic hydrocarbon group having 4 to 20 carbon atoms that includes at least one fluorine atom, R 2 represents an (m+1)-valent hydrocarbon group having 1 to 20 carbon atoms, provided that an oxygen atom, a sulfur atom, —NR′, a carbonyl group, —CO—O—, or —CO—NH— may be bonded to an end of R 2 that is bonded to R 3 , wherein R′ represents a hydrogen atom or a monovalent organic group, R 3 represents a single bond, a divalent chain-like hydrocarbon group having 1 to 10 carbon atoms, or a divalent alicyclic hydrocarbon group having 4 to 20 carbon atoms, X 2 represents a divalent chain-like hydrocarbon group having 1 to 20 carbon atoms that includes at least one fluorine atom, A represents an oxygen atom, —NR″, —CO—O—*, or —SO 2 —O—*, wherein R″ represents a hydrogen atom or a monovalent organic group and * indicates a bonding site bonded to R 4 , R 4 represents a hydrogen atom or a monovalent organic group, and m is an integer from 1 to 3, provided that a plurality of R 3 , a plurality of X 2 , a plurality of A, and a plurality of R 4 may respectively be either the same or different when m is 2 or 3.
7. The resin composition according to claim 1 , wherein the polymer includes the structural unit (III).