IP Library Granted Patent US 8,415,240
Granted Patent B1
US 8,415,240 · App. 13/209,767 · Granted Apr 9, 2013

Mesoscale pyramids, hole arrays and methods of preparation

Inventors: Teri W. Odom (Chicago, IL); Joel A. Henzie (Evanston, IL); Eun-Soo Kwak (San Jose, CA); Min Hyung Lee (Skokie, IL)
Assignee: Northwestern University
View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 8,415,240
App. No.
13/209,767
Granted
Apr 9, 2013
Kind
B1
Abstract

Composite films comprising two-dimensional hole arrays, and related methods of preparing hole arrays.

Claims (9)

1. A method for parallel fabrication of a free-standing two-dimensional through-hole array, said method comprising:

providing a substrate and a mask component thereon, said mask component comprising a plurality of apertures therethrough;

treating said substrate through said apertures and under said mask component with an anisotropic etchant, to provide a plurality of recesses in said substrate;

depositing at least two material components on said mask component, each said deposition for at least one of a rate and a time sufficient to provide a layered film of said material components on said mask component, said layered film comprising a through-hole array; and

removing said mask component and releasing said layered film from said substrate to provide said free-standing two-dimensional through-hole array.

2. The method of claim 1 comprising electron beam deposition of said material components.

3. The method of claim 1 comprising characterizing optical properties of at least one of said at least two material components and said through-hole array.

4. The method of claim 3 comprising at least one microscopic and spectroscopic analyses of at least one of said at least two material components said through-hole array.

5. The method of claim 4 comprising illuminating said through-hole array with an optical wavelength at least partially sufficient to induce a surface plasmon interaction therewith.

Assignments (2)
CONFIRMATORY LICENSE Recorded Jun 25, 2015
From: NORTHWESTERN UNIVERSITY
To: USA AS REPRESENTED BY THE ADMINISTRATOR OF THE NASA
Reel/Frame 036030/0673 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 15, 2011
From: ODOM, TERI W.; HENZIE, JOEL; KWAK, EUN-SOO; LEE, MIN HYUNG
To: NORTHWESTERN UNIVERSITY
Reel/Frame 026750/0401 →
Continuity (4)
Division 11493254 · Jul 26, 2006
Continuation In Part 11411594 · Apr 26, 2006
Provisional Application 60702646 · Jul 26, 2005
Provisional Application 60674786 · Apr 26, 2005