Method of producing substrate for magnetic recording media
View Patent ↗There is provided a method of producing a substrate for magnetic recording media which is capable of efficiently removing alumina abrasive grains in the latter polishing step that have been stuck in the former polishing step during polishing of the substrate for magnetic recording media in which a NiP plating film has been formed on the surface of an Al alloy substrate, the method including: a rough polishing step for polishing the surface of a substrate for magnetic recording media, which is prepared by forming a NiP plating film on the surface of an Al alloy substrate, using a first grinder while supplying a polishing liquid containing alumina abrasive grains; and a finish polishing step for polishing the substrate for magnetic recording media following washing, using a second grinder while supplying a polishing liquid containing colloidal silica abrasive grains, wherein supply of the polishing liquid containing alumina abrasive grains is stopped and alumina abrasive grains are removed from the grinder by supplying a washing liquid containing no abrasive grains instead at the end of the rough polishing step, followed by an intermediate polishing step provided for polishing the surface of the substrate for magnetic recording media using the first grinder while supplying a polishing liquid containing colloidal silica abrasive grains.
1. A method of producing a substrate for magnetic recording media comprising:
a rough polishing step of polishing a surface of a substrate for magnetic recording media using a first grinder while supplying a polishing liquid containing alumina abrasive grains to the first grinder, wherein the substrate is prepared by forming a NiP plating film on a surface of an Al alloy substrate; and
a finish polishing step of polishing the substrate for magnetic recording media following washing, using a second grinder while supplying a polishing liquid containing colloidal silica abrasive grains, after washing the substrate for magnetic recording media,
wherein the rough polishing step further comprises a step of stopping supply of the polishing liquid containing alumina abrasive grains and removing alumina abrasive grains from the first grinder by supplying a washing liquid containing no abrasive grains instead at the end of the rough polishing step;
the method of producing a substrate for magnetic recording media further comprises an intermediate polishing step provided for polishing the surface of the substrate for magnetic recording media using the first grinder while supplying a polishing liquid containing colloidal silica abrasive grains after the rough polishing step and before the finish polishing step;
and
an average particle size for the colloidal silica abrasive grains used in the finish polishing step is smaller than an average particle size for the colloidal silica abrasive grains used in the intermediate polishing step.
2. The method of producing a substrate for magnetic recording media according to claim 1 , wherein water is used as the washing liquid containing no abrasive grains.
3. The method of producing a substrate for magnetic recording media according to claim 2 , wherein a volume-based 50% cumulative average particle size (D50) for the colloidal silica abrasive grains used in the finish polishing step is 5 to 180 nm.
4. The method of producing a substrate for magnetic recording media according to claim 1 ,
wherein a volume-based 50% cumulative average particle size (D50) for the alumina abrasive grains used in the rough polishing step is 0.1 to 0.7 μm, and
a volume-based 50% cumulative average particle size (D50) for the colloidal silica abrasive grains used in the intermediate polishing step is 15 to 400 nm.
5. The method of producing a substrate for magnetic recording media according to claim 4 , wherein a volume-based 50% cumulative average particle size (D50) for the colloidal silica abrasive grains used in the finish polishing step is 5 to 180 nm wherein the volume-based 50% cumulative average particle size (D50) for the colloidal silica abrasive grains used in the finish polishing step is smaller than the volume-based 50% cumulative average particle size (D50) for the colloidal silica abrasive grains used in the intermediate polishing step.
6. The method of producing a substrate for magnetic recording media according to claim 1 , wherein a volume-based 50% cumulative average particle size (D50) for the colloidal silica abrasive grains used in the finish polishing step is 5 to 180 nm.