Dynamic random access memory and method for fabricating the same
The present invention provides a dynamic random access memory (DRAM) including a plurality of transistors formed in a semiconductor substrate, wherein each of the transistors includes a vertical channel region. A plurality of bit line contained trenches is formed in the semiconductor substrate. Each of the bit line contained trenches comprises two bit lines, and each of the bit lines is electrically connected to an adjacent transistor. Each two sidewalls of each of the bit line contained trenches have a contact formed thereon. A plurality of word lines are formed over the plurality of bit lines and electrical connect to the plurality of transistors. Furthermore, a method for fabricating the DRAM is also provided.
1. A dynamic random access memory, comprising
a plurality of transistors formed in a semiconductor substrate, wherein each of the transistors comprises a vertical channel region;
a plurality of bit line contained trenches formed in the semiconductor substrate, wherein each of the bit line contained trenches comprises two bit lines, and a capping oxide layer sandwiched between the two bit lines to electrically isolate the two bit line from each other, and each of the bit lines is electrically connected to an adjacent transistor, and wherein each two sidewalls of each of the bit line contained trenches has a contact formed thereon, and wherein the capping oxide layer partially extends into an insulating layer under the bit lines; and
a plurality of word lines formed over the plurality of bit lines and electrically connecting to the plurality of transistors.
2. The dynamic random access memory as claimed in claim 1 , wherein each of the bit lines is electrically connected to the adjacent transistor via one of the contacts.
3. The dynamic random access memory as claimed in claim 1 , wherein the contacts have a height of between 20 and 500 nm.
4. The dynamic random access memory as claimed in claim 1 , further comprising a plurality of storage capacitors on a top of the plurality of transistors.
5. The dynamic random access memory as claimed in claim 1 , further comprising two bit line plugs disposed between any two adjacent bit line contained trenches.
6. The dynamic random access memory as claimed in claim 1 , further comprising two word line plugs disposed between any two adjacent word lines.
7. The dynamic random access memory as claimed in claim 1 , wherein the contacts comprise doped polysilicon.
8. The dynamic random access memory as claimed in claim 1 , wherein the dynamic random access memory comprises 4F 2 memory cells.