Integrated circuit comprising a device with a vertical mobile element integrated in a support substrate and method for producing the device with a mobile element
The integrated circuit comprises a support substrate having opposite first and second main surfaces. A cavity passes through the support substrate and connects the first and second main surfaces. The integrated circuit comprises a device with a mobile element, the mobile element and a pair of associated electrodes of which are included in a cavity. An anchoring node of the mobile element is located at the level of the first main surface. The integrated circuit comprises a first elementary chip arranged at the level of the first main surface and electrically connected to the device with a mobile element.
1. An integrated circuit comprising:
a support substrate provided with opposite first and second main surfaces,
a cavity passing through the support substrate from one of the main surface to the opposite main surface,
a device with a mobile element formed in said support substrate, wherein the mobile element is included in the cavity, the mobile element having a first anchoring node on the first main surface, a second anchoring node on the second main surface, and a maximum displacement area, the first and second anchoring nodes and the maximum displacement area defining an axis substantially perpendicular to the first and second main surfaces,
at least one elementary chip arranged on one of the main surfaces and adapted to be electrically linked to the device with a mobile element.
2. The device according to claim 1 , further comprising an actuating circuitry of the mobile element included in the cavity.
3. The device according to claim 2 , wherein the actuating circuitry is configured to perform electrostatic actuation and comprises a first electrode overlapping a second electrode, one of the electrodes being arranged on the mobile element.
4. The device according to claim 1 , wherein the at least one elementary chip is formed in the support substrate, the support substrate being made from semi-conductor material.
5. The device according to claim 1 , wherein the at least one elementary chip comprises an electric connection passing through the support substrate, the electric connection being electrically linked to the device with a mobile element.