IP Library Granted Patent US 8,736,825
Granted Patent B2
US 8,736,825 · App. 13/234,951 · Granted May 27, 2014

Quantum efficiency measurement system and method of use

Inventors: Razvan Ciocan (Auburndale, MA); John Donohue (Shelton, CT); Arkady Feldman (Stanford, CT); Zhuoyun Li (Worcester, MA)
Assignee: Newport Corporation
View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 8,736,825
App. No.
13/234,951
Granted
May 27, 2014
Kind
B2
Abstract

A system for measuring a characteristic of a solar cell is disclosed and includes a light source irradiating an optical signal having a spectral range from about 100 nm to about 3000 nm, a wavelength selector configured to selectively narrow the spectral range of the optical signal, a beam splitter, a reference detector in optical communication with the beam splitter and configured to measure a characteristic of the optical signal, a specimen irradiated with the optical signal, a reflectance detector in optical communication with the specimen via the beam splitter and configured to measure an optical characteristic of the optical signal reflected by the specimen, a multiplexer in communication with at least one of the reference detector, specimen, and reflectance detector, and a processor in communication with at least one of the reference detector, specimen, and reflectance detector via the multiplexer and configured to calculate at least one characteristic of the specimen.

Claims (31)

1. A system for measuring a characteristic of at least one specimen, comprising:

at least one light source irradiating an at least one optical signal having a spectral range from about 100 nm to about 3000 nm;

at least one wavelength selector configured to selectively narrow the spectral range of the at least one optical signal;

at least one beam splitter;

at least one reference detector in optical communication with the at least one beam splitter and configured to measure at least one characteristic of the at least one optical signal;

wherein the at least one specimen is irradiated with the at least one optical signal from the at least one beam splitter;

at least one reflectance detector in optical communication with the at least one specimen via the at least one beam splitter, the at least one reflectance detector configured to measure the at least one optical characteristic of the at least one optical signal reflected by the at least one specimen;

at least one processor in communication with at least one of the at least one reference detector, the at least one specimen, and the at least one reflectance detector, the at least one processor configured to calculate at least one characteristic of the at least one specimen based on data received from at least one of the at least one reference detector, the at least one specimen, and the at least one reflectance detector, wherein the at least one characteristic of the at least one specimen comprises a quantum efficiency of the at least one specimen.

2. The system of claim 1 further comprising at least one wavelength filter positioned proximate to the at least one light source and configured to spectrally narrow the at least one optical signal irradiated by the at least one light source.

3. The system of claim 1 further comprising at least one modulator positioned proximate to the at least one light source and configured to selectively modulate the at least one optical signal emitted by the at least one light source.

4. The system of claim 1 wherein the at least one processor is configured to calculate the internal quantum efficiency of the at least one specimen based on the calculated quantum efficiency and data received from at least one of the at least one reference detector, the at least one specimen, and the at least one reflectance detector.

5. The system of claim 1 further comprising a transmission detector positioned proximate to the at least one specimen, the transmission detector configured to detect the at least one optical signal irradiated by the at least one light source and transmitted through the at least one specimen.

6. The system of claim 5 , further comprising at least one multiplexer, wherein the transmission detector is in communication with the at least one multiplexer.

7. The system of claim 1 further comprising:

at least one multiplexer; and

a detector measuring device in communication with at least one of the at least one multiplexer and the at least one processor.

8. The system of claim 7 wherein the detector measuring device comprises a lock-in amplifier.

9. The system of claim 1 further comprising at least one light bias controller in communication with the at least one processor and the at least one specimen.

10. The system of claim 1 further comprising at least one electrical bias controller in communication with the at least one processor and the at least one specimen.

11. A method of measuring the quantum efficiency and internal quantum efficiency of a specimen, comprising:

generating at least one optical signal having a controlled wavelength and intensity;

splitting the at least one optical signal into a first signal and second signal;

directing the first signal into a reference detector configured to measure at least one optical characteristic of the first signal;

measuring the at least one optical characteristic of the first signal with the reference detector;

directing the second signal to a specimen;

measuring at least one optical characteristic of the second signal reflected by the specimen with a reflectance detector;

measuring a photo-generated electrical signal by the specimen at each wavelength of the incident second signal;

multiplexing the data from reference and reflectance detectors with a multiplexer simultaneously in communication with the reference and reflectance detectors; and

calculating the quantum efficiency of the specimen based on the at least one optical characteristics measured by the reference and reflectance detectors with a processor in communication with a multiplexer.

12. The method of claim 11 further comprising calculating the internal quantum efficiency of the specimen with the processor.

13. The system of claim 1 , further comprising at least one multiplexer in communication with at least one of the at least one reference detector, the at least one specimen, and the at least one reflectance detector, wherein the at least one processor is in communication with at least one of the at least one reference detector, the at least one specimen, and the at least one reflectance detector via the at least one multiplexer.

Assignments (11)
RELEASE OF SECURITY INTEREST Recorded Aug 24, 2022
From: BARCLAYS BANK PLC
To: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION; ELECTRO SCIENTIFIC INDUSTRIES, INC.
Reel/Frame 063009/0001 →
RELEASE OF SECURITY INTEREST Recorded Aug 24, 2022
From: BARCLAYS BANK PLC
To: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION; ELECTRO SCIENTIFIC INDUSTRIES, INC.
Reel/Frame 062739/0001 →
SECURITY INTEREST Recorded Aug 19, 2022
From: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION; ELECTRO SCIENTIFIC INDUSTRIES, INC.
To: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
Reel/Frame 061572/0069 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE U.S. PATENT NO.7,919,646 PREVIOUSLY RECORDED ON REEL 048211 FRAME 0312. ASSIGNOR(S) HEREBY CONFIRMS THE PATENT SECURITY AGREEMENT (ABL). Recorded Jan 14, 2021
From: ELECTRO SCIENTIFIC INDUSTRIES, INC.; MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: BARCLAYS BANK PLC, AS COLLATERAL AGENT
Reel/Frame 055668/0687 →
RELEASE OF SECURITY INTEREST Recorded Feb 1, 2019
From: DEUTSCHE BANK AG NEW YORK BRANCH
To: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
Reel/Frame 048226/0095 →
PATENT SECURITY AGREEMENT (ABL) Recorded Feb 1, 2019
From: ELECTRO SCIENTIFIC INDUSTRIES, INC.; MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: BARCLAYS BANK PLC, AS COLLATERAL AGENT
Reel/Frame 048211/0312 →
SECURITY AGREEMENT Recorded May 4, 2016
From: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: DEUTSCHE BANK AG NEW YORK BRANCH
Reel/Frame 038663/0265 →
SECURITY AGREEMENT Recorded May 4, 2016
From: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: BARCLAYS BANK PLC; BARCLAYS BANK PLC
Reel/Frame 038663/0139 →
RELEASE OF SECURITY INTEREST Recorded Apr 29, 2016
From: JPMORGAN CHASE BANK N.A., AS ADMINISTRATIVE AGENT
To: NEWPORT CORPORATION
Reel/Frame 038581/0112 →
SECURITY AGREEMENT Recorded Jul 22, 2013
From: NEWPORT CORPORATION
To: JPMORGAN CHASE BANK, NATIONAL ASSOCIATION, AS ADMINISTRATIVE AGENT
Reel/Frame 030847/0005 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 16, 2011
From: CIOCAN, RAZVAN; DONOHUE, JOHN; FELDMAN, ARKADY; LI, ZHUOYUN
To: NEWPORT CORPORATION
Reel/Frame 026921/0561 →
Continuity (3)
Continuation PCTUS2010035445 · May 19, 2010
Provisional Application 61216704 · May 19, 2009
Related Publication 20120010854A1 · Jan 12, 2012