IP Library Granted Patent US 8,895,162
Granted Patent B2
US 8,895,162 · App. 13/236,028 · Granted Nov 25, 2014

Magnetoresistive element and magnetic memory

Inventors: Katsuya Nishiyama (Yokohama, JP); Wu Feng (Sendai, JP); Shigemi Mizukami (Sendai, JP); Terunobu Miyazaki (Sendai, JP); Hiroaki Yoda (Sagamihara, JP); Tadashi Kai (Tokyo, JP); Tatsuya Kishi (Yokohama, JP); Daisuke Watanabe (Sendai, JP); Mikihiko Oogane (Sendai, JP); Yasuo Ando (Sendai, JP); Masatoshi Yoshikawa (Yokohama, JP); Toshihiko Nagase (Yokohama, JP); Eiji Kitagawa (Yokohama, JP); Tadaomi Daibou (Kawasaki, JP); Makoto Nagamine (Tokyo, JP)
Assignees: Kabushiki Kaisha Toshiba; National University Corporation Tohoku University
H01L27/228H01L43/08H01F10/329H01L43/10H01F10/28H01F10/3272H01F10/3254H01F10/1936G11C11/16H01F10/3286G01R33/09B82Y25/00
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Quick Facts
Patent No.
US 8,895,162
App. No.
13/236,028
Granted
Nov 25, 2014
Kind
B2
Abstract

A magnetoresistive element according to an embodiment includes: a base layer; a first magnetic layer formed on the base layer and having a changeable magnetization direction with an easy axis of magnetization in a direction perpendicular to a film plane; a first nonmagnetic layer formed on the first magnetic layer; and a second magnetic layer formed on the first nonmagnetic layer and having a fixed magnetization layer with an easy axis of magnetization in a direction perpendicular to the film plane. The first magnetic layer includes a ferrimagnetic layer having a DO 22 structure or an L1 0 structure, the ferrimagnetic layer has a c-axis oriented in a direction perpendicular to the film plane, and the magnetization direction of the first magnetic layer is changeable by a current flowing through the first magnetic layer, the first nonmagnetic layer, and the second magnetic layer.

Claims (21)

1. A magnetoresistive element comprising:

a base layer including a first layer made of a perovskite conductive oxide that is made of ABO 3 and is oriented to a (002) plane, a site A being formed with at least one element selected from the group consisting of Sr, Ce, Dy, La, K, Ca, Na, Pb, and Ba, a site B being formed with at least one element selected from the group consisting of Ti, V, Cr, Mn, Fe, Co, Ni, Ga, Nb, Mo, Ru, Ir, Ta, Ce, and Pb;

a first magnetic layer formed on the base layer and having a changeable magnetization direction with an easy axis of magnetization in a direction perpendicular to a film plane;

a first nonmagnetic layer formed on the first magnetic layer; and

a second magnetic layer formed on the first nonmagnetic layer and having a fixed magnetization layer with an easy axis of magnetization in a direction perpendicular to the film plane,

the first magnetic layer including a ferrimagnetic layer having a DO 22 structure, the ferrimagnetic layer having a c-axis oriented in a direction perpendicular to the film plane and being an alloy layer containing Mn and Ga, the magnetization direction of the first magnetic layer being changeable by a current flowing through the first magnetic layer, the first nonmagnetic layer, and the second magnetic layer.

2. The magnetoresistive element according to claim 1 , wherein the base layer further includes a second layer that is formed on a first layer and contains a metal having a tetragonal structure or a cubic structure, the metal being oriented to a (001) plane.

3. The magnetoresistive element according to claim 1 , further comprising:

a second nonmagnetic layer formed on the second magnetic layer; and

a third magnetic layer formed on the second nonmagnetic layer, having an easy axis of magnetization in a direction perpendicular to a film plane, and having a magnetization direction antiparallel to the magnetization direction of the second magnetic layer,

wherein the relationship, M S2 ×t 2 <M S3 ×t 3 , is satisfied, where M S2 represents saturation magnetization of the second magnetic layer, t 2 represents a film thickness of the second magnetic layer, M S3 represents saturation magnetization of the third magnetic layer, and t 3 represents a film thickness of the third magnetic layer.

4. The magnetoresistive element according to claim 1 , further comprising

a first interfacial layer formed between the second magnetic layer and the first nonmagnetic layer,

wherein the first interfacial layer is made of an alloy (Co 100-x Fe x ) 100-y B y (x≧20 atomic %, 0<y≦30 atomic %).

5. The magnetoresistive element according to claim 1 , further comprising

a second interfacial layer formed between the first magnetic layer and the first nonmagnetic layer,

wherein the second interfacial layer is made of an alloy (Co 100-x Fe x ) 100-y B y (x≧20 atomic %, 0<y≦30 atomic %).

6. The magnetoresistive element according to claim 5 , wherein the second interfacial layer is a cubic structure or a tetragonal structure, and is oriented to a (100) plane.

7. A magnetic memory comprising:

the magnetoresistive element according to claim 1 ; and

memory cells that are positioned to sandwich the magnetoresistive element, the memory cells including first and second electrodes for energizing the magnetoresistive element.

Assignments (4)
MERGER AND CHANGE OF NAME Recorded Feb 10, 2022
From: TOSHIBA MEMORY CORPORATION; K.K. PANGEA
To: TOSHIBA MEMORY CORPORATION
Reel/Frame 059003/0256 →
CHANGE OF NAME Recorded Feb 10, 2022
From: TOSHIBA MEMORY CORPORATION
To: KIOXIA CORPORATION
Reel/Frame 059003/0389 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 29, 2017
From: KABUSHIKI KAISHA TOSHIBA
To: TOSHIBA MEMORY CORPORATION
Reel/Frame 043438/0591 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 28, 2011
From: NISHIYAMA, KATSUYA; FENG, WU AS REPRESENTED BY HEIR, FENG, CHUNLAN; MIZUKAMI, SHIGEMI; MIYAZAKI, TERUNOBU; YODA, HIROAKI; KAI, TADASHI; KISHI, TATSUYA; WATANABE, DAISUKE; OOGANE, MIKIHIKO; ANDO, YASUO; YOSHIKAWA, MASATOSHI; NAGASE, TOSHIHIKO; KITAGAWA, EIJI; DAIBOU, TADAOMI; NAGAMINE, MAKOTO
To: KABUSHIKI KAISHA TOSHIBA; NATIONAL UNIVERSITY CORPORATION TOHOKU UNIVERSITY
Reel/Frame 027453/0061 →
Priority Claims (1)
JP 2009-079633 · Mar 27, 2009 · national
Continuity (2)
Continuation PCTJP2010053611 · Mar 5, 2010
Related Publication 20120088125A1 · Apr 12, 2012