Pull up electrode and waffle type microstructure
The present invention generally relates to MEMS devices and methods for their manufacture. The cantilever of the MEMS device may have a waffle-type microstructure. The waffle-type microstructure utilizes the support beams to impart stiffness to the microstructure while permitting the support beam to flex. The waffle-type microstructure permits design of rigid structures in combination with flexible supports. Additionally, compound springs may be used to create very stiff springs to improve hot-switch performance of MEMS devices. To permit the MEMS devices to utilize higher RF voltages, a pull up electrode may be positioned above the cantilever to help pull the cantilever away from the contact electrode.
1. A micro-electromechanical device, comprising:
a first structural layer coupled to a plurality of first electrodes;
a second structural layer spaced from the first structural layer to define a space between the first structural layer and the second structural layer, wherein the second structural layer has a length less than a length of the first structural layer;
a plurality of posts disposed within the space and coupled between the first structural layer and the second structural layer, the first structural layer, the second structural layer and the plurality of posts forming a waffle pattern; and
one or more electrically conductive compound springs spaced from the first structural layer, the second structural layer and the plurality of posts and disposed within a cavity, wherein the one or more electrically conductive compound springs are adjacent a RF electrode.
2. The micro-electromechanical device of claim 1 , wherein the first structural layer is spaced from one or more second electrodes.
3. The micro-electromechanical device of claim 2 , further comprising:
a dielectric layer; and
the one or more second electrodes embedded within the dielectric layer, wherein the one or more second electrodes are embedded within the dielectric layer and wherein the first structural layer, the second structural layer and the plurality of posts are collectively movable between a position in which the first structural layer is in contact with the dielectric layer and a position in which the first structural layer is spaced from the dielectric layer.
4. The micro-electromechanical device of claim 3 , wherein the first structural layer, the second structural layer and the plurality of posts are disposed within a cavity having a roof spaced from the second structural layer, the device further comprising:
one or more third electrodes coupled to the roof and spaced from the second structural layer and wherein the first structural layer, the second structural layer and the plurality of posts are collectively movable between a position in which the second structural layer is in contact with the one or more third electrodes and a position in which the second structural layer is spaced from the one or more third electrodes.
5. The micro-electromechanical device of claim 1 , wherein the first structural layer, the second structural layer and the plurality of posts are disposed within a cavity having a roof spaced from the second structural layer.
6. The micro-electromechanical device of claim 5 , wherein the first structural layer, the second structural layer and the plurality of posts are movable within the cavity.
7. A micro-electromechanical device, comprising:
a first structural layer coupled to one or more first electrodes;
a second structural layer spaced from the first structural layer to define a space between the first structural layer and the second structural layer, wherein the second structural layer has a length less than a length of the first structural layer;
a plurality of posts disposed within the space and coupled between the first structural layer and the second structural layer, each of the plurality posts spaced from an adjacent post, the first structural layer, second structural layer, and plurality of posts collectively forming a cantilever that is disposed within a cavity; and
one or more electrically conductive compound springs spaced from the cantilever and disposed within the cavity.
8. The device of claim 7 , wherein the first structural layer is spaced from one or more second electrodes.
9. The micro-electromechanical device of claim 8 , further comprising:
a dielectric layer; and
the one or more second electrodes embedded within the dielectric layer, wherein the one or more second electrodes are embedded within the dielectric layer and wherein the first structural layer, the second structural layer and the plurality of posts are collectively movable between a position in which the first structural layer is in contact with the dielectric layer and a position in which the first structural layer is spaced from the dielectric layer.
10. The micro-electromechanical device of claim 9 , wherein the first structural layer, the second structural layer and the plurality of posts are disposed within a cavity having a roof spaced from the second structural layer, the device further comprising:
one or more third electrodes coupled to the roof and spaced from the second structural layer and wherein the first structural layer, the second structural layer and the plurality of posts are collectively movable between a position in which the second structural layer is in contact with the one or more third electrodes and a position in which the second structural layer is spaced from the one or more third electrodes.
11. The device of claim 7 , wherein the first structural layer is movable from a position spaced from the one or more electrically conductive compound springs and a position in contact with the one or more electrically conductive springs.
12. The device of claim 11 , wherein the one or more electrically conductive springs are movable from a position spaced from a dielectric layer and a position in contact with the dielectric layer.