Granted Patent B2

US 8,935,981 · App. 13/245,288 · Granted Jan 20, 2015

Abstract

Claims (39)

1. A method of fabricating a template having high-contrast alignment marks comprising the steps of:

(a) providing a template having a surface having an alignment area and a fine feature area, each such area having a plurality of protrusions and recessions;

(b) forming a first layer on the fine feature area;

(c) depositing high contrast material on the alignment area and the formed first layer;

(d) forming a second layer over the deposited high contrast material

(e) removing a portion of the second layer such that a remaining portion of the second layer remains in the recessions of the alignment area;

(f) removing a portion of the high contrast material such that a remaining portion of the high contrast material remains in the recessions of the alignment area;

(g) removing the first layer from the fine feature area together with the remaining portion of the second layer from the recessions of the alignment area.

2. The method of claim 1 wherein the first layer is formed by dispensing a polymerizable material on the template surface, contacting the polymerizable material with an imprint lithography template, and solidifying the polymerizable material.

3. The method of claim 1 wherein forming the first layer further comprises:

forming a precursor layer over both the fine feature and alignment areas, with the precursor layer having a first thickness over the fine feature area and a second thickness over the alignment area and where the first thickness is greater than the second thickness;

removing a portion of the precursor layer such that the alignment area is exposed while a remaining portion of the precursor layer remains over fine feature area and defines the first formed layer.

4. The method of claim 3 wherein the precursor layer is formed by dispensing a polymerizable material on the template surface, contacting the polymerizable material with an imprint lithography template, and solidifying the polymerizable material.

5. The method of claim 3 wherein the removing the precursor layer portion further comprises a descum etch step.

6. The method of claim 1 wherein the second formed layer is planarized.

7. The method of claim 1 wherein the second layer is formed by dispensing a polymerizable material on the template surface, contacting the polymerizable material with an imprint lithography template, and solidifying the polymerizable material.

8. The method of claim 1 wherein the removing the second layer portion further comprises a descum etch step.

9. The method of claim 1 wherein the removing of the high contrast material step further comprises a reactive ion etching (RIE) step.

10. The method of claim 1 wherein the removing the first layer further comprises a descum etch step.

11. A method of fabricating a template having high-contrast alignment marks comprising the steps of:

(a) providing a template having a surface having an alignment area and a fine feature area, each such area having a plurality of protrusions and recessions;

(b) forming a first layer on the fine feature area by dispensing a polymerizable material on the fine feature area of the template surface, contacting the polymerizable material with an imprint lithography template, and solidifying the polymerizable material;

(c) depositing high contrast material on the alignment area and the formed first layer;

(d) forming a second planarized layer over the deposited high contrast material;

(e) removing a portion of the second layer such that a remaining portion of the second layer remains in the recessions of the alignment area;

(f) removing a portion of the high contrast material such that a remaining portion of the high contrast material remains in the recessions of the alignment area; and

(g) removing the first layer from the fine feature area together with the remaining portion of the second layer from the recessions of the alignment area.

12. The method of claim 11 wherein the second layer is formed by dispensing a polymerizable material on the template surface, contacting the polymerizable material with an imprint lithography template, and solidifying the polymerizable material.

13. A method of fabricating a template having high-contrast alignment marks comprising the steps of:

(a) providing a template having a surface having an alignment area and a fine feature area, each such area having a plurality of protrusions and recessions;

(b) forming a precursor layer over both the fine feature and alignment areas, with the precursor layer having a first thickness over the fine feature area and a second thickness over the alignment area and where the first thickness is greater than the second thickness;

(c) removing a portion of the precursor layer such that the alignment area is exposed and a remaining portion of the precursor layer defining a first formed layer remains over fine feature area;

(d) depositing high contrast material on the alignment area and the formed first layer;

(e) forming a second planarized layer over the deposited high contrast material

(f) removing a portion of the second layer such that a remaining portion of the second layer remains in the recessions of the alignment area;

(g) removing a portion of the high contrast material such that a remaining portion of the high contrast material remains in the recessions of the alignment area; and

(h) removing the first layer from the fine feature area together with the remaining portion of the second layer from the recessions of the alignment area.

14. The method of claim 13 wherein the precursor layer is formed by dispensing a polymerizable material on the template surface, contacting the polymerizable material with an imprint lithography template, and solidifying the polymerizable material.

15. The method of claim 13 wherein the second layer is formed by dispensing a polymerizable material on the template surface, contacting the polymerizable material with an imprint lithography template, and solidifying the polymerizable material.

Assignments (7)