IP Library › Patent Application 13252294
Patent Application
App. No. 13/252,294

LASER UNIT WITH SUPPRESSED FEEDBACK

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Quick Facts
Patent No.
US None
App. No.
13/252,294
Abstract

Laser unit, preferably for gas detection, with a semiconductor laser chip comprising an output mirror with an exit zone for a laser beam and an optical element that reduces self-mixing which is arranged at the exit zone, wherein optical element and laser chip are connected with each other with direct physical contact over an entire surface, at least in the exit zone. Said optical element is connected to the laser chip positively or by means of an optical medium. Thereby optionally a beam-shaping element may be arranged on the optical element that is connected positively or by means of an optical medium with the optical element. Preferably beam-shaping element and optical element have similar or identical refractory indices and are connected with each other and with the laser chip by adhesive agents having corresponding refractory indices.

Claims (16)

1 . A laser unit with a semiconductor laser chip that comprises an output mirror with an exit zone for a laser beam, wherein an optical element that reduces self-mixing is arranged at the exit zone, with the optical element that reduces self-mixing and the laser chip being connected with each other over the entire surface, at least in the exit zone,

wherein the self-mixing reducing optical element is a delay plate and has a thickness that generates a delay corresponding to an even or odd multiple of a one quarter wavelength of the laser beam.

2 . The laser unit according to claim 1 , wherein the optical element that reduces self-mixing is connected positively or by means of an optical medium with the laser chip.

3 . (canceled)

4 . The laser unit according to claim 1 , wherein the optical element that reduces self-mixing is a quartz plate.

5 . The laser unit according to claim 1 , wherein the output mirror is mounted on the optical element that reduces self-mixing and is attached by means of wafer-bonding as one unit to the laser chip consisting of a VCSEL semilaser structure.

6 . The laser unit according to claim 1 , wherein the optical element that reduces self-mixing is attached to a VCSEL laser structure by means of wafer-bonding.

7 . The laser unit according to claim 1 , wherein an optical beam-shaping element is arranged on the optical element that reduces self-mixing.

8 . The laser unit according to claim 7 , wherein the optical element that reduces self-mixing is connected positively or by means of an optical medium with the beam-shaping element.

9 . The laser unit according to claim 2 , wherein the optical medium between the optical element that reduces self-mixing and the semiconductor laser chip has a refractory index that is similar to or identical with that of the optical element that reduces self-mixing, and/or that the optical medium between the optical element that reduces self-mixing and the beam-shaping element has a refractory index that is similar to or identical with that of the optical element that reduces self-mixing or that of the beam-shaping element.

10 . The laser unit according to claim 9 , wherein the optical medium is an adhesive, a gel and/or a liquid.

11 . The laser unit according to claim 1 , wherein the semiconductor laser chip is enclosed in a housing with an exit opening for the laser beam.

12 . The laser unit according to claim 1 , configured for gas detection.

13 . The laser unit according to claim 2 , wherein the delay plate is a quartz plate.

14 . The laser unit according to claim 7 , wherein the optical beam-shaping element is a spherical or semispherical lens in the form of a microlens.

15 . The laser unit according to claim 11 , wherein the housing is hermetically sealed with an exit window.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 2, 2012
From: LEISTER PROCESS TECHNOLOGIES
To: AXETRIS AG
Reel/Frame 027638/0541 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 8, 2011
From: WITTMANN, ANDREAS; STUDER, MICHEL; PROTASIO, RUI; FRASCHINA, CORRADO
To: LEISTER PROCESS TECHNOLOGIES
Reel/Frame 027353/0088 →