Avalanche breakdown test apparatus
View Patent ↗To detect whether energy accumulated in an inductive load section has been discharged. Provided is a test apparatus that tests a device under test, comprising a power supply section that generates a power supply voltage to be supplied to the device under test; an inductive load section that is provided in a path between the power supply section and the device under test; a housing section that houses a substrate that includes at least the inductive load section; and a lock maintaining section that keeps an opening/closing section, which allows an operator to access the substrate within the housing section, in a locked state when a voltage at a predetermined position on the substrate is greater than a set voltage.
1. A test apparatus that tests a device under test, comprising:
a power supply section that generates a power supply voltage to be supplied to the device under test;
an inductive load section that is provided in a path between the power supply section and the device under test;
a housing section that houses a substrate that includes at least the inductive load section;
a lock maintaining section that keeps an opening/closing section, which allows an operator to access the substrate within the housing section, in a locked state when a voltage at a predetermined position on the substrate is greater than a set voltage, wherein the lock maintaining section keeps the opening/closing section in the locked state when there is energy remaining in the inductive load section; and
a discharge switch that discharges energy accumulated in the inductive load section after testing is finished.
2. The test apparatus according to claim 1 , wherein the lock maintaining section keeps the opening/closing section in the locked state when the voltage at one end of the inductive load section is greater than the set voltage.
3. The test apparatus according to claim 1 , wherein the discharge switch connects each end of the inductive load section to a predetermined reference potential.
4. The test apparatus according to claim 1 , further comprising a clamping section that limits voltage applied to the device under test to be within a predetermined range, wherein the lock maintaining section keeps the opening/closing section in the locked state when voltage of the clamping section is greater than a predetermined voltage.
5. The test apparatus according to claim 1 , wherein when the voltage at a predetermined location on the substrate is greater than the set voltage, the lock maintaining section detects the voltage at the predetermined location again after a prescribed time has passed.
6. The test apparatus according to claim 1 , wherein the lock maintaining section prohibits a handler apparatus, which transports the device under test to the test apparatus, from accessing the test apparatus when the voltage at a predetermined location on the substrate is greater than the set voltage.
7. The test apparatus according to claim 1 , further comprising a power supply switch provided between the power supply section and the inductive load section.
8. The test apparatus according to claim 1 , wherein the device under test is an insulated-gate bipolar transistor.
9. A test apparatus that tests a device under test, comprising:
a power supply section that generates a power supply voltage to be supplied to the device under test;
an inductive load section that is provided in a path between the power supply section and the device under test;
a housing section that houses a substrate that includes at least the inductive load section;
a clamping section that limits voltage applied to the device under test to be within a predetermined range; and
a lock maintaining section that keeps an opening/closing section, which allows an operator to access the substrate within the housing section, in a locked state when a voltage at a predetermined position on the substrate is greater than a set voltage, wherein the lock maintaining section keeps the opening/closing section in the locked state when voltage of the clamping section is greater than a predetermined voltage.
10. The test apparatus according to claim 9 , wherein the lock maintaining section keeps the opening/closing section in the locked state when the voltage at one end of the inductive load section is greater than the set voltage.
11. The test apparatus according to claim 9 , further comprising a discharge switch that discharges energy accumulated in the inductive load section after testing is finished, wherein the lock maintaining section keeps the opening/closing section in the locked state when there is energy remaining in the inductive load section.
12. The test apparatus according to claim 11 , wherein the discharge switch connects each end of the inductive load section to a predetermined reference potential.
13. The test apparatus according to claim 9 , wherein when the voltage at a predetermined location on the substrate is greater than the set voltage, the lock maintaining section detects the voltage at the predetermined location again after a prescribed time has passed.
14. The test apparatus according to claim 9 , wherein the lock maintaining section prohibits a handler apparatus, which transports the device under test to the test apparatus, from accessing the test apparatus when the voltage at a predetermined location on the substrate is greater than the set voltage.
15. The test apparatus according to claim 9 , further comprising a power supply switch provided between the power supply section and the inductive load section.
16. The test apparatus according to claim 9 , wherein the device under test is an insulated-gate bipolar transistor.