IP Library Granted Patent US 8,832,861
Granted Patent B2
US 8,832,861 · App. 13/259,484 · Granted Sep 9, 2014

Near field optical microscope

Inventor: Nenad Ocelic (Martinsried, DE)
Assignee: Neaspec GmbH
G01Q60/22B82Y35/00B82Y20/00Y10S977/826
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Quick Facts
Patent No.
US 8,832,861
App. No.
13/259,484
Granted
Sep 9, 2014
Kind
B2
Abstract

The invention relates to a device for conducting near-field optical measurements of a specimen, a method for conducting near-field optical measurements and the use of the device.

Claims (13)

1. A device for the near-field optical measurement of a specimen comprising a probe, a primary mirror ( 10 ), which is a concave mirror, and at least two secondary mirror(s) ( 30 ), wherein each one of the secondary mirrors ( 30 ) is located in an independent optical pathway, whereby each one independent optical pathway starts at the probe and passes the primary mirror ( 10 ) and the secondary mirror ( 30 ), each one of the secondary mirrors ( 30 ) is the first mirror located in the respective independent optical pathway downwards the primary mirror ( 10 ), whereby the optical pathways start at the probe and pass the primary mirror ( 10 ), and the secondary mirrors ( 30 ) are arranged such that the parts of different independent optical pathways that are located downwards the secondary mirrors ( 30 ) are not parallel to each other, whereby the independent optical pathways start at the probe and pass the primary mirror ( 10 ) and the respective secondary mirror ( 30 ).

2. A device for the near-field optical measurement of a specimen comprising a probe, a primary mirror ( 10 ), which is a concave mirror, and one or more secondary mirror(s) ( 30 ), wherein each one of the secondary mirrors ( 30 ) is located in an independent optical pathway, whereby each one independent optical pathway starts at the probe and passes the primary mirror ( 10 ) and the secondary mirror ( 30 ), each one of the secondary mirrors ( 30 ) is the first mirror located in the respective independent optical pathway downwards the primary mirror ( 10 ), whereby the optical pathways start at the probe and pass the primary mirror ( 10 ), and at least one of the secondary mirrors ( 30 ) is arranged such that the distance of the edge of the secondary mirror ( 32 ) to the probe is less or equal to about half the focal distance of the primary mirror ( 10 ).

3. The device according to claim 2 , wherein the secondary mirrors ( 30 ) are arranged such that the parts of different independent optical pathways that are located downwards of the secondary mirrors ( 30 ) are not parallel to each other, whereby the independent optical pathways start at the probe and pass the primary mirror ( 10 ) and the respective secondary mirror ( 30 ).

4. The device according to claim 1 , wherein the at least two independent optical pathways are reflected on the primary mirror ( 10 ) at different areas of the primary mirror.

5. The device according to claim 1 , wherein the at least two independent optical pathways do not overlap except at the probe.

6. The device according to claim 1 , wherein the secondary mirrors ( 30 ) are planar mirrors.

7. The device according to claim 1 , wherein the primary mirror ( 10 ) is a parabolic mirror.

8. The device according to claim 1 , wherein the secondary mirrors ( 30 ) are arranged such that the parts of the independent optical pathways that are located downwards the secondary mirrors, form an angle of about 20° to about 180°.

9. The device according to claim 1 , wherein the probe or a holder of the probe is located substantially between two of the secondary mirrors ( 30 ).

10. The device according to claim 1 , wherein said device has two secondary mirrors ( 30 ).

11. The device according to claim 1 , wherein the distance from the centre of the reflective area of the secondary mirror(s) ( 30 ) to the focal point of the primary mirror ( 10 ) is less than about four times the focal distance of the primary mirror ( 10 ).

12. A method for scanning the optical near-field of a specimen, comprising the step of analyzing the specimen using the device according to claim 1 .

13. The device according to claim 1 , wherein the distance from the centre of the reflective area of the secondary mirror(s) ( 30 ) to the focal point of the primary mirror ( 10 ) is less than about two times the focal distance of the primary mirror ( 10 ).

Assignments (2)
MERGER Recorded Jan 27, 2021
From: NEASPEC GMBH
To: ATTOCUBE SYSTEMS AG
Reel/Frame 055049/0757 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 23, 2011
From: OCELIC, NENAD
To: NEASPEC GMBH
Reel/Frame 026958/0598 →
Priority Claims (1)
EP 09004136 · Mar 23, 2009 · regional
Continuity (1)
Related Publication 20120005793A1 · Jan 5, 2012