Methods for forming planarized hermetic barrier layers and structures formed thereby
View Patent ↗Methods and associated structures of forming a microelectronic structure are described. Those methods may comprise forming a conductive material in an interconnect opening within an interlayer dielectric material that is disposed on a substrate, forming a low density dielectric material on a surface of the dielectric layer and on a surface of the conductive material, and forming a high density dielectric barrier layer on the low density dielectric layer.
1. A method comprising:
forming a conductive material that is configured to include at least one of a dopant surface interface layer, a hydride surface interface layer, and a metal cap, the conductive material is formed in an interconnect opening within an interlayer dielectric material that is disposed on a substrate;
forming a low density dielectric material on a surface of the interlayer dielectric layer and on a surface of the conductive material; and
forming a high density dielectric barrier layer on the low density dielectric layer.
2. The method of claim 1 further comprising wherein the high density dielectric barrier layer comprises a k value of about 4.0 and above.
3. The method of claim 2 further comprising wherein the low density dielectric material planarizes a surface of the conductive material and the surface of the interlayer dielectric material.
4. The method of claim 1 further comprising wherein the low density dielectric layer comprises a k value of about 3.3 and below.
5. The method of claim 1 further comprising wherein the high density barrier is about less than about ¼ of the thickness of the low density dielectric material.
6. The method of claim 1 wherein additional interlayer dielectric material is formed on the high density dielectric barrier layer.
7. The method of claim 1 further comprising wherein the low density dielectric material comprises at least one of SiC:H, SiCN:H, SiOC:H, SiNx:H, SiC:H, SiBN, BN, and AIN.
8. The method of claim 1 further comprising wherein the surface of the interlayer dielectric layer and the surface of the conductive material are exposed to a plasma process comprising at least one of H2, NH3, N2, and Ar.
9. The method of claim 1 further comprising wherein the low density dielectric comprises a density less than about 1.5 g/cm3 and a k value less than about 4.0.
10. The method of claim 1 further comprising wherein the high density dielectric layer comprises a density greater than about 2.0 g/cm3 and a thickness of about 1 to about 6 nm.