Switching apparatus and test apparatus
View Patent ↗Provided is a switching apparatus comprising a contact point section that includes a first contact point; an actuator that includes a second contact point and moves the second contact point to contact or move away from the first contact point; and a control section that controls a first drive voltage. The actuator includes a first piezoelectric film that expands and contracts according to the first drive voltage and a support layer disposed on the first piezoelectric film. The control section causes the first piezoelectric film to contract by causing a change from a voltage that applies an electric field that is less than a first coercive electric field to a voltage that applies an electric field that exceeds the first coercive electric field, and causes the first piezoelectric film to expand by outputting a voltage that applies an electric field that is less than a second coercive electric field.
1. A switching apparatus comprising:
a contact point section that includes a first contact point;
an actuator that includes a second contact point that can move into contact with and move away from the first contact point, a first piezoelectric film that expands and contracts according to a first drive voltage, a support layer disposed on the first piezoelectric film, and a second piezoelectric film disposed on the support layer that expands and contracts according to a second drive voltage; and
a control section that controls the first drive voltage and the second drive voltage, wherein
the control section causes the first piezoelectric film to contract by causing a change from a voltage that applies an electric field to the first piezoelectric film that is less than a first coercive electric field to a voltage that applies an electric field to the first piezoelectric film that exceeds the first coercive electric field, and causes the first piezoelectric film to expand by outputting a voltage that applies an electric field to the first piezoelectric film that is less than a second coercive electric field, and
the control section causes the second piezoelectric film to contract by causing a change from a voltage that applies an electric field to the second piezoelectric film that is less than the first coercive electric field to a voltage that applies an electric field to the second piezoelectric film that exceeds the first coercive electric field, and to expand the second piezoelectric film by causing a voltage that applies an electric field to the second piezoelectric film that is less than the second coercive electric field to be output,
wherein when moving the second contact point into contact with the first contact point, the control section causes the actuator to bend toward the first piezoelectric film by applying to the first piezoelectric film the first drive voltage causing the first piezoelectric film to contract, and
when switching the first contact point and the second contact point from a contact state to a separated state by moving the second contact point away from the first contact point, the control section biases the actuator to return by stopping the supply of the first drive voltage and applying to the second piezoelectric film the second drive voltage causing the second piezoelectric film to contract.
2. The switching apparatus according to claim 1 , wherein
the control section switches whether the actuator is biased to return by the second piezoelectric film according to an initial position, cumulative usage time, or cumulative number of uses of the actuator.
3. The switching apparatus according to claim 1 , wherein
when bringing the first contact point and the second contact point into contact with each other, the control section applies the first drive voltage causing the first piezoelectric film to contract, and applies the second drive voltage that causes the second piezoelectric film to expand.
4. The switching apparatus according to claim 1 , wherein
the first piezoelectric film and the second piezoelectric film are disposed at respective sides of a central plane of the actuator in a height direction of the actuator.
5. The switching apparatus according to claim 4 , wherein
the first piezoelectric film and the second piezoelectric film have substantially the same thickness and are disposed substantially the same distance in the height direction from the central plane of the actuator.
6. The switching apparatus according to claim 5 , wherein
the actuator includes a plurality of films that are layered substantially symmetrically with respect to the central plane of the actuator in the height direction.
7. The switching apparatus according to claim 1 , wherein
the first piezoelectric film and the second piezoelectric film are each a PZT film.
8. The switching apparatus according to claim 7 , wherein
when forming the first piezoelectric film or the second piezoelectric film, the support layer is heated to a firing temperature together with the first piezoelectric film or the second piezoelectric film.
9. The switching apparatus according to claim 1 , wherein
when moving the first contact point and the second contact point away from each other out of a contact state, the control section biases the actuator to return by applying an electric field that is less than the second coercive electric field to the first piezoelectric film to expand the first piezoelectric film.
10. The switching apparatus according to claim 1 , wherein
the support layer is an insulating film including SiO 2 or SiN.
11. A test apparatus that tests a device under test, comprising:
a testing section that tests the device under test by exchanging electrical signals with the device under test; and
the switching apparatus according to claim 1 that is provided between the testing section and the device under test and provides an electrical connection or disconnection between the testing section and the device under test.
12. A switching apparatus comprising:
a contact point section that includes a first contact point;
an actuator that includes a second contact point that can move into contact with and move away from the first contact point, a first piezoelectric film that expands and contracts according to the first drive voltage, a support layer disposed on the first piezoelectric film, and a second piezoelectric film disposed on the support layer that expands and contracts according to a second drive voltage; and
a control section that controls the first drive voltage and the second drive voltage, wherein
the control section causes the first piezoelectric film to contract by causing a change from a voltage that applies an electric field to the first piezoelectric film that is less than a first coercive electric field to a voltage that applies an electric field to the first piezoelectric film that exceeds the first coercive electric field, and causes the first piezoelectric film to expand by outputting a voltage that applies an electric field to the first piezoelectric film that is less than a second coercive electric field, and
the control section causes the second piezoelectric film to contract by causing a change from a voltage that applies an electric field to the second piezoelectric film that is less than the first coercive electric field to a voltage that applies an electric field to the second piezoelectric film that exceeds the first coercive electric field, and to expand the second piezoelectric film by causing a voltage that applies an electric field to the second piezoelectric film that is less than the second coercive electric field to be output
wherein when bringing the first contact point and the second contact point into contact with each other, the control section applies the first drive voltage causing the first piezoelectric film to contract, and applies the second drive voltage that causes the second piezoelectric film to expand.
13. The switching apparatus according to claim 12 , wherein
the control section switches whether the actuator is biased to return by the second piezoelectric film according to an initial position, cumulative usage time, or cumulative number of uses of the actuator.
14. The switching apparatus according to claim 12 , wherein
the first piezoelectric film and the second piezoelectric film are disposed at respective sides of a central plane of the actuator in a height direction of the actuator.
15. The switching apparatus according to claim 14 , wherein
the first piezoelectric film and the second piezoelectric film have substantially the same thickness and are disposed substantially the same distance in the height direction from the central plane of the actuator.
16. The switching apparatus according to claim 15 , wherein
the actuator includes a plurality of films that are layered substantially symmetrically with respect to the central plane of the actuator in the height direction.
17. The switching apparatus according to claim 12 , wherein
the first piezoelectric film and the second piezoelectric film are each a PZT film.
18. The switching apparatus according to claim 17 , wherein
when forming the first piezoelectric film or the second piezoelectric film, the support layer is heated to a firing temperature together with the first piezoelectric film or the second piezoelectric film.
19. The switching apparatus according to claim 12 , wherein
when moving the first contact point and the second contact point away from each other out of a contact state, the control section biases the actuator to return by applying an electric field that is less than the second coercive electric field to the first piezoelectric film to expand the first piezoelectric film.
20. The switching apparatus according to claim 12 , wherein
the support layer is an insulating film including SiO 2 or SiN.