Optical device and optical modulation apparatus
View Patent ↗Provided is an optical modulator that modulates input light with a high frequency and low half-wave voltage. An optical device comprises a substrate; a dielectric film that is formed on the substrate and includes a first optical waveguide and a second optical waveguide that run parallel to each other; an insulating film formed on the dielectric film; a coplanar line that is formed on the insulating film and includes a signal line arranged between the first optical waveguide and the second optical waveguide, a first ground line arranged in a first region, and a second ground line arranged in a second region; and auxiliary electrodes that are arranged in the first region and the second region, are formed in contact with the dielectric film or within the insulating film, and apply bias voltages to the first optical waveguide and the second optical waveguide.
1. An optical device comprising:
a substrate;
a dielectric film that is formed on the substrate and includes a first optical waveguide and a second optical waveguide that run parallel to each other;
an insulating film formed on the dielectric film;
a coplanar line that is formed on the insulating film and includes a signal line arranged between the first optical waveguide and the second optical waveguide, a first ground line arranged in a first region on a side of the first optical waveguide opposite the second optical waveguide, and a second ground line arranged in a second region on a side of the second optical waveguide opposite the first optical waveguide; and
auxiliary electrodes that are arranged in the first region and the second region, are formed in contact with the dielectric film or within the insulating film, and apply bias voltages to the first optical waveguide and the second optical waveguide, wherein
the auxiliary electrode arranged in the first region is an electrode to which a positive bias voltage is applied, and
the auxiliary electrode arranged in the second region is an electrode to which a negative bias voltage is applied.
2. The optical device according to claim 1 , wherein
the auxiliary electrodes are arranged closer to the first optical waveguide and the second optical waveguide than the first ground line and the second ground line.
3. The optical device according to claim 1 , wherein
the dielectric film further includes:
a first photocoupler that branches input light and guides the resulting light to the first optical waveguide and the second optical waveguide; and
a second photocoupler that combines the light from the first optical waveguide and the second optical waveguide, and
the first optical waveguide, the second optical waveguide, the first photocoupler, and the second photocoupler form a Mach-Zehnder optical waveguide.
4. The optical device according to claim 1 , wherein
the substrate is formed of a single-crystal material.
5. The substrate according to claim 4 , wherein
the substrate is a sapphire substrate or a MgO substrate.
6. The optical device according to claim 1 , wherein
the dielectric film is a ferroelectric thin film.
7. The optical device according to claim 6 , wherein
the ferroelectric thin film is a PZT thin film, a PLZT thin film, or a BaTiO 3 thin film, which have Perovskite crystal structures.
8. The optical device according to claim 1 , wherein
the insulating film includes SiO 2 or SiN x .
9. The optical device according to claim 1 , wherein
the auxiliary electrode arranged in the first region is connected to the first ground line,
the auxiliary electrode arranged in the second region is connected to the second ground line, and
the first ground line and the second ground line are connected to a predetermined reference voltage via a capacitor.
10. The optical device of claim 1 , further comprising a ground electrode that is arranged between the first optical waveguide and the second optical waveguide, formed either in contact with the dielectric film or between the dielectric film and the insulating film, and connected to a predetermined reference voltage.
11. The optical device of claim 10 , wherein
the signal line of the coplanar line is connected to the ground electrode, and
the coplanar line further includes:
a first differential signal line formed on the insulating film in the first region, between the signal line and the first ground line; and
a second differential signal line formed on the insulating film in the second region, between the signal line and the second ground line.
12. An optical modulation apparatus comprising:
the optical device of claim 1 ; and
a frequency signal source that supplies the signal line with a frequency signal having a predetermined frequency.
13. The optical device of claim 1 , wherein
the auxiliary electrodes are formed in contact with the dielectric film and within the insulating film.
14. The optical device of claim 1 , wherein
the signal line, the first ground line and the second ground line are formed on a surface of the insulating film opposite to a surface contacting the dielectric film.
15. The optical device of claim 1 , wherein
the first optical waveguide is arranged in contact with the insulating film and between the auxiliary electrode arranged in the first region and the signal line, and the second optical waveguide is arranged in contact with the insulating film and between the auxiliary electrode arranged in the second region and the signal line.
16. The optical device of claim 1 , wherein
the insulating film has a dielectric constant lower than that of the dielectric film, and the substrate has a dielectric constant lower than that of the dielectric film.