Switching apparatus, switching apparatus manufacturing method, transmission line switching apparatus, and test apparatus
View Patent ↗A package of a switching apparatus that houses an actuator having a movable contact point and in which a fixed contact point, which is electrically connected to or disconnected form the movable contact point, is accurately formed. Provided is a switching apparatus comprising a first substrate provided with a via that electrically connects a top surface thereof and a bottom surface thereof, while maintaining an air-tight state between the top surface and the bottom surface; a second substrate provided on the first substrate and in which is formed a through-hole that houses an actuator; and a third substrate provided on the second substrate and supporting the actuator, which has a moveable contact point.
1. A switching apparatus comprising:
a first substrate provided with a via that electrically connects a top surface thereof and a bottom surface thereof, while maintaining an air-tight state between the top surface and the bottom surface;
a second substrate provided on the first substrate and in which is formed a through-hole that houses an actuator; and
a third substrate provided on the second substrate and supporting the actuator, which has a moveable contact point;
wherein the actuator includes
a support layer,
a first piezoelectric film formed on a top surface of the support layer,
a second piezoelectric film that is provided on a surface of the support layer opposite the surface on which the first piezoelectric film is formed, facing the first piezoelectric film across the support layer, and that expands and contracts according to drive voltage to change a bowing amount of the actuator,
electrode layers that are respectively provided on top surfaces and bottom surfaces of each of the first piezoelectric film and the second piezoelectric film and apply drive voltages thereto, and
a second conductive oxide film that has a conductive oxide formed between the second piezoelectric film and the electrode layer on a side of the second piezoelectric film opposite the support layer.
2. The switching apparatus according to claim 1 , wherein
the first substrate includes a fixed contact point that is electrically connected to the via on the top surface, and
the actuator electrically connects or disconnects the movable contact point to or from the fixed contact point, according to application of drive voltage to a piezoelectric film of the actuator.
3. The switching apparatus according to claim 1 , wherein
the through-hole of the second substrate has a tapered shape moving from the first substrate side toward the third substrate side.
4. The switching apparatus according to claim 1 , wherein
the actuator further includes a first conductive oxide film that has a conductive oxide formed between the first piezoelectric film and the electrode layer on a side of the first piezoelectric film opposite the support layer.
5. The switching apparatus according to claim 1 , wherein
a main component of the conductive oxide film is an Ir-type oxide such as IrO2, a Ru-type oxide such as RuO2 or SRO, or an oxide including LSCO or LNO.
6. The switching apparatus according to claim 1 wherein
the first piezoelectric film and the second piezoelectric film are PZT films.
7. The switching apparatus according to claim 1 wherein the actuator further includes:
a first protective film that is formed by an insulating material, covers at least a portion of the first piezoelectric film from a side of the first piezoelectric film that is opposite the support layer, and contacts the support layer at least at a portion of an end portion of the first piezoelectric film; and
a second protective film that is formed by an insulating material, covers at least a portion of the second piezoelectric film from a side of the second piezoelectric film that is opposite the support layer, and contacts the support layer at least at a portion of an end portion of the second piezoelectric film.
8. The switching apparatus according to claim 1 wherein
the support layer is formed by an insulating material.
9. The switching apparatus according to claim 8 , wherein
the insulating material includes SiO2 or SiN.
10. The switching apparatus according to claim 1 , wherein
the first substrate and the second substrate are formed by a glass material.
11. A transmission line switching apparatus comprising an input end, a plurality of output ends, and a plurality of the switching apparatuses according to claim 1 respectively connected between the input end and the plurality of output ends.
12. A test apparatus that performs a loop-back test on a device under test, the test apparatus comprising:
a testing section that tests the device under test by exchanging electrical signals with the device under test; and
the transmission line switching apparatus according to claim 11 that is provided between the testing section and the device under test such that the input end is connected to the testing section, and the plurality of output ends are connected to the device under test, wherein the transmission line switching apparatus switches between supplying the device under test with a signal from the testing section and looping a signal from the device under test back to the device under test.
13. A test apparatus that tests a device under test, the test apparatus comprising:
a testing section connectable to the device under test that tests the device under test by exchanging electrical signals with the device under test; and
the switching apparatus according to claim 1 that is provided between the testing section and the device under test and provides an electrical connection or disconnection between the testing section and the device under test.
14. A switching apparatus comprising:
a first substrate provided with a via that electrically connects a top surface thereof and a bottom surface thereof, while maintaining an air-tight state between the top surface and the bottom surface;
a second substrate provided on the first substrate and in which is formed a through-hole that houses an actuator;
a third substrate provided on the second substrate and supporting the actuator, which has a moveable contact point; and
a fourth substrate that seals an opening of the second substrate on an opposite side of the third substrate.
15. The switching apparatus according to claim 14 , wherein
the first substrate includes a fixed contact point that is electrically connected to the via on the top surface, and
the actuator electrically connects or disconnects the movable contact point to or from the fixed contact point, according to application of drive voltage to a piezoelectric film of the actuator.
16. The switching apparatus according to claim 14 , wherein
the through-hole of the second substrate has a tapered shape moving from the first substrate side toward the third substrate side.
17. The switching apparatus according to claim 14 , wherein
the first substrate and the second substrate are formed by a glass material.
18. A transmission line switching apparatus comprising a plurality of the switching apparatuses according to claim 14 respectively connected between an input end and a plurality of output ends.
19. A test apparatus that performs a loop-back test on a device under test, the test apparatus comprising:
a testing section that tests the device under test by exchanging electrical signals with the device under test; and
the transmission line switching apparatus according to claim 18 that is provided between the testing section and the device under test and switches between supplying the device under test with a signal from the testing section and looping a signal from the device under test back to the device under test.
20. A test apparatus that tests a device under test, the test apparatus comprising:
a testing section that tests the device under test by exchanging electrical signals with the device under test; and
the switching apparatus according to claim 14 that is provided between the testing section and the device under test and provides an electrical connection or disconnection between the testing section and the device under test.