Polarization element, projector, liquid crystal device, electronic apparatus, and method of manufacturing polarization element
A polarization element according to the invention includes a substrate, a metal layer and an absorber layer formed on the substrate to form a stripe in a plan view and stacked in a thickness direction of the substrate, a first dielectric layer formed on a surface of the metal layer and a second dielectric layer formed on a surface of the absorber layer. The first dielectric layer is made of an oxide of a metal constituting the metal layer, and the second dielectric layer is made of an oxide of a material constituting the absorber layer.
1. A polarization element comprising:
a substrate;
a metal layer and an absorber layer formed on the substrate to form a stripe in a plan view and stacked in a thickness direction of the substrate;
a first dielectric layer formed on a surface of the metal layer, and made of an oxide of a metal constituting the metal layer; and
a second dielectric layer formed on a surface of the absorber layer, and made of an oxide of a material constituting the absorber layer.
2. The polarization element according to claim 1 , further comprising:
a third dielectric layer formed between the metal layer and the absorber layer.
3. The polarization element according to claim 2 , further comprising:
a fourth dielectric layer formed as an upper layer of a laminate body, the laminate body including the metal layer and the absorber layer.
4. The polarization element according to claim 1 , wherein
the absorber layer is made of at least one material selected from the group consisting of silicon, germanium, and chromium.
5. The polarization element according to claim 1 , wherein
the metal layer is made of at least one metal selected from the group consisting of aluminum, silver, copper, chromium, titanium, nickel, tungsten, and iron.
6. A projector comprising:
an illumination optical system adapted to emit a light;
a liquid crystal light valve adapted to modulate the light; and
a projection optical system adapted to project the light modulated by the liquid crystal light valve on a projection target surface,
wherein the polarization element according to claim 1 is disposed at least one of between the liquid crystal light valve and the illumination optical system and between the liquid crystal light valve and the projection optical system.
7. A projector comprising:
an illumination optical system adapted to emit a light;
a liquid crystal light valve adapted to modulate the light; and
a projection optical system adapted to project the light modulated by the liquid crystal light valve on a projection target surface,
wherein the polarization element according to claim 2 is disposed at least one of between the liquid crystal light valve and the illumination optical system and between the liquid crystal light valve and the projection optical system.
8. A projector comprising:
an illumination optical system adapted to emit a light;
a liquid crystal light valve adapted to modulate the light; and
a projection optical system adapted to project the light modulated by the liquid crystal light valve on a projection target surface,
wherein the polarization element according to claim 3 is disposed at least one of between the liquid crystal light valve and the illumination optical system and between the liquid crystal light valve and the projection optical system.
9. A projector comprising:
an illumination optical system adapted to emit a light;
a liquid crystal light valve adapted to modulate the light; and
a projection optical system adapted to project the light modulated by the liquid crystal light valve on a projection target surface,
wherein the polarization element according to claim 4 is disposed at least one of between the liquid crystal light valve and the illumination optical system and between the liquid crystal light valve and the projection optical system.
10. A liquid crystal device comprising:
a liquid crystal layer held between a pair of substrates; and
the polarization element according to claim 1 formed on the liquid crystal layer side of at least one of the pair of substrates.
11. A liquid crystal device comprising:
a liquid crystal layer held between a pair of substrates; and
the polarization element according to claim 2 formed on the liquid crystal layer side of at least one of the pair of substrates.
12. A liquid crystal device comprising:
a liquid crystal layer held between a pair of substrates; and
the polarization element according to claim 3 formed on the liquid crystal layer side of at least one of the pair of substrates.
13. A liquid crystal device comprising:
a liquid crystal layer held between a pair of substrates; and
the polarization element according to claim 4 formed on the liquid crystal layer side of at least one of the pair of substrates.
14. An electronic apparatus comprising the liquid crystal device according to claim 10 .
15. An electronic apparatus comprising the liquid crystal device according to claim 11 .
16. An electronic apparatus comprising the liquid crystal device according to claim 12 .
17. An electronic apparatus comprising the liquid crystal device according to claim 13 .