Contact for high-K metal gate device
A method of making an integrated circuit includes providing a substrate with a high-k dielectric and providing a polysilicon gate structure over the high-k dielectric. A doping process is performed on the substrate adjacent to the polysilicon gate structure, after which the polysilicon gate structure is removed and replaced with a metal gate structure. An interlayer dielectric (ILD) is deposited over the metal gate structure and the doped substrate, and a dry etch process forms a trench in the ILD to a top surface of the metal gate structure. After the dry etch process, a wet etch process forms an undercut near the top surface of the metal gate structure. The trench and undercut are then filled with a conductive material.
1. A method of making an integrated circuit, the method comprising:
providing a substrate;
forming a metal structure over the substrate;
providing a dielectric over the metal structure;
performing a first etch process to create a trench in the dielectric over the metal structure;
performing a second, isotropic etch process to form an undercut in the metal structure, the undercut being proximate to the trench; and
filling the trench and undercut with a conductive material to contact the metal structure.
2. The method of claim 1 further comprising:
forming a high-k gate dielectric between the substrate and the metal structure.
3. The method of claim 1 wherein the metal gate structure includes a plurality of metal layers including copper and titanium.
4. The method of claim 1 wherein the first etch process include a dry etch and the second etch process includes a wet etch.
5. The method of claim 4 wherein a metal material of the metal structure includes one or more of Cu, Al, and Ti, and the wet etch is selective to at least a portion of the metal material.
6. The method of claim 1 wherein the undercut is contained within the metal structure.
7. The method of claim 1 further including:
forming source and drain regions in the substrate; and
wherein the first etch process creates additional trenches in the dielectric and proximate to the source and drain regions.
8. The method of claim 1 further comprising:
depositing a glue layer in the undercut prior to filling the undercut with a conductive material.
9. A method for making an integrated circuit, comprising:
providing a substrate with a high-k dielectric;
providing a polysilicon gate structure over the high-k dielectric;
performing a doping process on the substrate adjacent to the polysilicon gate structure;
removing the polysilicon gate structure and thereafter forming a metal gate structure;
depositing an interlayer dielectric (ILD) over the metal gate structure and the doped substrate;
performing a dry etch process to form a trench in the ILD to a top surface of the metal gate structure;
after the dry etch process, performing a wet etch process to form an undercut near the top surface of the metal gate structure; and
filling the trench and undercut with a conductive material.
10. The method of claim 9 , wherein the metal gate structure includes at least one of copper or aluminum, and the wet etch process is selective to the copper or aluminum.
11. The method of claim 9 further comprising:
forming a film over the metal gate structure prior to depositing the ILD.
12. The method of claim 11 wherein the film includes an oxynitride.
13. The method of claim 11 wherein the film acts as an etch stop for the dry etch process.