Semiconductor device and method for manufacturing the same
View Patent ↗A semiconductor device is manufactured using a transistor in which an oxide semiconductor is included in a channel region and variation in electric characteristics due to a short-channel effect is less likely to be caused. The semiconductor device includes an oxide semiconductor film having a pair of oxynitride semiconductor regions including nitrogen and an oxide semiconductor region sandwiched between the pair of oxynitride semiconductor regions, a gate insulating film, and a gate electrode provided over the oxide semiconductor region with the gate insulating film positioned therebetween. Here, the pair of oxynitride semiconductor regions serves as a source region and a drain region of the transistor, and the oxide semiconductor region serves as the channel region of the transistor.
1. A method for manufacturing a semiconductor device, comprising the steps of:
forming an oxide semiconductor film over an insulating surface over a substrate;
forming a gate insulating film over the oxide semiconductor film;
forming a gate electrode over the gate insulating film;
forming a pair of oxynitride semiconductor regions by implanting an ion including nitrogen into the oxide semiconductor film with the gate electrode used as a mask;
forming a wiring connected to one of the pair of oxynitride semiconductor regions; and
heating the substrate with a substrate temperature higher than or equal to 150 ° C. and lower than or equal to 600 ° C. after forming the pair of oxynitride semiconductor regions.
2. The method for manufacturing a semiconductor device according to claim 1 , wherein the ion including nitrogen is implanted so that a nitrogen concentration of the pair of oxynitride semiconductor regions is higher than or equal to 0.01 at. % and lower than or equal to 30 at. %.
3. The method for manufacturing a semiconductor device according to claim 1 , wherein the oxide semiconductor film is formed so that a hydrogen concentration of the pair of oxynitride semiconductor regions is higher than or equal to 1 ×10 19 atoms/cm 3 and lower than or equal to 1×10 22 atoms/cm 3 , and so that a hydrogen concentration of a region sandwiched between the pair of oxynitride semiconductor regions is lower than or equal to 1×10 20 atoms/cm 3 .
4. The method for manufacturing a semiconductor device according to claim 1 , wherein the oxide semiconductor film is provided to comprise two or more of In, Ga, Sn, and Zn.
5. The method for manufacturing a semiconductor device according to claim 1 , wherein oxygen is released from at least one of an insulating film having the insulating surface and the gate insulating film by heating.
6. The method for manufacturing a semiconductor device according to claim 1 , further comprising the step of forming an insulating film over the gate electrode,
wherein the heating step is performed during the step of forming the insulating film.
7. The method for manufacturing a semiconductor device according to claim 1 , wherein ions including nitrogen and hydrogen are implanted into the oxide semiconductor film in the step of forming the pair of oxynitride semiconductor regions.
8. A method for manufacturing a semiconductor device, comprising the steps of:
forming an oxide semiconductor film over an insulating surface over a substrate;
forming a gate insulating film covering the oxide semiconductor film;
forming a conductive film over the gate insulating film;
forming a gate electrode by processing the conductive film;
forming a pair of oxynitride semiconductor regions in a region of the oxide semiconductor film, which does not overlap with the gate electrode, by implanting an ion including nitrogen into the oxide semiconductor film through the gate insulating film;
forming a wiring connected to one of the pair of oxynitride semiconductor regions; and
heating the substrate with a substrate temperature higher than or equal to 150 ° C. and lower than or equal to 600 ° C. after forming the pair of oxynitride semiconductor regions.
9. The method for manufacturing a semiconductor device according to claim 8 , wherein the ion including nitrogen is implanted so that a nitrogen concentration of the pair of oxynitride semiconductor regions is higher than or equal to 0.01 at. % and lower than or equal to 30 at. %.
10. The method for manufacturing a semiconductor device according to claim 8 , wherein the oxide semiconductor film is formed so that a hydrogen concentration of the pair of oxynitride semiconductor regions is higher than or equal to 1 ×10 19 atoms/cm 3 and lower than or equal to 1×10 22 atoms/cm 3 , and so that a hydrogen concentration of a region sandwiched between the pair of oxynitride semiconductor regions is lower than or equal to 1×10 20 atoms/cm 3 .
11. The method for manufacturing a semiconductor device according to claim 8 , wherein the oxide semiconductor film is provided to comprise two or more of In, Ga, Sn, and Zn.
12. The method for manufacturing a semiconductor device according to claim 8 , wherein oxygen is released from at least one of an insulating film having the insulating surface and the gate insulating film by heating.
13. The method for manufacturing a semiconductor device according to claim 8 , further comprising the step of forming an insulating film over the gate electrode,
wherein the heating step is performed during the step of forming the insulating film.
14. The method for manufacturing a semiconductor device according to claim 8 , wherein ions including nitrogen and hydrogen are implanted into the oxide semiconductor film in the step of forming the pair of oxynitride semiconductor regions.
15. A method for manufacturing a semiconductor device, comprising the steps of:
forming an oxide semiconductor film over an insulating surface over a substrate;
forming a first insulating film covering the oxide semiconductor film;
forming a conductive film over the first insulating film;
forming a gate electrode and a gate insulating film from which a part of the oxide semiconductor film is exposed, by processing the conductive film and the first insulating film;
forming a pair of oxynitride semiconductor regions in the part of the exposed oxide semiconductor film by implanting an ion including nitrogen into the oxide semiconductor film;
forming a wiring connected to one of the pair of oxynitride semiconductor regions; and
heating the substrate with a substrate temperature higher than or equal to 150 ° C. and lower than or equal to 600 ° C. after forming the pair of oxynitride semiconductor regions.
16. The method for manufacturing a semiconductor device according to claim 15 , wherein the ion including nitrogen is implanted so that a nitrogen concentration of the pair of oxynitride semiconductor regions is higher than or equal to 0.01 at. % and lower than or equal to 30 at. %.
17. The method for manufacturing a semiconductor device according to claim 15 , wherein the oxide semiconductor film is formed so that a hydrogen concentration of the pair of oxynitride semiconductor regions is higher than or equal to 1 ×10 19 atoms/cm 3 and lower than or equal to 1×10 22 atoms/cm 3 , and so that a hydrogen concentration of a region sandwiched between the pair of oxynitride semiconductor regions is lower than or equal to 1×10 20 atoms/cm 3 .
18. The method for manufacturing a semiconductor device according to claim 15 , wherein the oxide semiconductor film is provided to comprise two or more of In, Ga, Sn, and Zn.
19. The method for manufacturing a semiconductor device according to claim 15 , wherein oxygen is released from at least one of a second insulating film having the insulating surface and the gate insulating film by heating.
20. The method for manufacturing a semiconductor device according to claim 15 , further comprising the step of forming an insulating film over the gate electrode,
wherein the heating step is performed during the step of forming the insulating film.
21. The method for manufacturing a semiconductor device according to claim 15 , wherein ions including nitrogen and hydrogen are implanted into the oxide semiconductor film in the step of forming the pair of oxynitride semiconductor regions.