IP Library › Patent Application 13293718
Patent Application
App. No. 13/293,718

MGF2 OPTICAL THIN FILM INCLUDING AMORPHOUS SILICON OXIDE BINDER, OPTICAL ELEMENT PROVIDED WITH THE SAME, AND METHOD FOR PRODUCING MGF2 OPTICAL THIN FILM

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Patent No.
US None
App. No.
13/293,718
Abstract

An MgF 2 optical thin film is formed on an optical surface of a base material. The MgF 2 optical thin film includes MgF 2 particles and an amorphous silicon oxide-based binder which exists on the surfaces of the MgF 2 particles and between the MgF 2 particles. Owing to this amorphous silicon oxide-based binder, the optical thin film can have high mechanical strength and high adhesion to the base material, while having excellent environment resistance and a lower refractive index.

Claims (37)

1 . A method for producing an MgF 2 optical thin film, comprising:

preparing a sol solution, in which MgF 2 minute particles are dispersed, by mixing a magnesium compound and a fluorine compound in a solvent;

placing the sol solution in a vessel which is tightly closable and performing a pressurizing treatment and a heat treatment at the same time;

preparing a binder solution which contains a component capable of forming an amorphous silicon oxide-based binder by a reaction, the amorphous silicon oxide-based binder being composed of amorphous silica;

preparing a coating liquid by mixing the sol solution for which the pressurizing treatment and the heat treatment have been performed and the binder solution;

forming a film by coating the coating liquid on a base material and by performing drying; and

performing a heat treatment after forming the film, wherein the MgF 2 minute particles are connected to one another by the amorphous silicon oxide-based binder.

2 . A method for producing an MgF 2 optical thin film, the method comprising:

preparing a sol solution, in which MgF 2 minute particles are dispersed, by mixing a magnesium compound and a fluorine compound in a solvent;

placing the sol solution in a vessel which is tightly closable and performing a pressurizing treatment and a heat treatment at the same time;

preparing a binder solution which contains a component capable of forming an amorphous silicon oxide-based binder by a reaction, the amorphous silicon oxide-based binder being composed of amorphous silica;

forming a porous film by coating the sol solution, for which the pressurizing treatment and the heat treatment have been performed, on a base material and by performing drying;

coating the binder solution on the porous film and impregnating the binder solution into the porous film; and

performing a heat treatment after the impregnation,

wherein the MgF 2 minute particles are connected to one another by the amorphous silicon oxide-based binder.

3 . The method for producing the MgF 2 optical thin film according to claim 1 if wherein the magnesium compound is magnesium acetate, the fluorine compound is hydrofluoric acid, and the solvent is methanol.

4 . The method for producing the MgF 2 optical thin film according to claim 1 , wherein a molar ratio of fluorine contained in the fluorine compound existing in the solvent to magnesium contained in the magnesium compound existing in the solvent is 1.9 to 2.0.

5 . The method for producing the MgF 2 optical thin film according to claim 1 , wherein the component, which is capable of forming the amorphous silicon oxide-based binder, is an organic silicon compound.

6 . The method for producing the MgF 2 optical thin film according to claim 5 , wherein the organic silicon compound is silicon alkoxide, a polymer thereof, or polysilazane.

7 . The method for producing the MgF 2 optical thin film according to claim 1 , wherein an SiO 2 -converted concentration of silicon in the coating liquid is not more than 5% by weight.

8 . The method for producing the MgF 2 optical thin film according to claim 1 , wherein the coating liquid is coated on the base material by a spin coat method or a dip coat method.

9 . The method for producing the MgF 2 optical thin film according to claim 1 , wherein the coating liquid is coated on the base material in an atmosphere of relative humidity of 5% to 40% by a spin coat method.

10 . The method for producing the MgF 2 optical thin film according to claim 1 , wherein the coating liquid is coated on the base material by a spin coat method by rotating the base material at a maximum number of revolutions of 500 rpm to 9,000 rpm within 3 seconds after supplying the coating liquid to the base material.

11 . The method for producing the MgF 2 optical thin film according to claim 1 , wherein the MgF 2 optical thin film having a desired refractive index is produced by adjusting an SiO 2 -converted concentration of silicon in the coating liquid.

12 . The method for producing the MgF 2 optical thin film according to claim 1 , wherein a plurality of pieces of the MgF 2 optical thin film having desired refractive index is produced by adjusting a molar ratio of fluorine contained in the fluorine compound to magnesium contained in the magnesium compound of the sol solution.

13 . The method for producing the MgF 2 optical thin film according to claim 1 , wherein the MgF 2 minute particles have an average particle diameter of 1 nm to 100 nm.

14 . The method for producing the MgF 2 optical thin film according to claim 2 , wherein the magnesium compound is magnesium acetate, the fluorine compound is hydrofluoric acid, and the solvent is methanol.

15 . The method for producing the MgF 2 optical thin film according to claim 2 , wherein a molar ratio of fluorine contained in the fluorine compound existing in the solvent to magnesium contained in the magnesium compound existing in the solvent is 1.9 to 2.0.

16 . The method for producing the MgF 2 optical thin film according to claim 2 , wherein the component, which is capable of forming the amorphous silicon oxide-based binder, is an organic silicon compound.

17 . The method for producing the MgF 2 optical thin film according to claim 6 , wherein the organic silicon compound is silicon alkoxide, a polymer thereof, or polysilazane.

18 . The method for producing the MgF 2 optical thin film according to claim 2 , wherein an SiO 2 -converted concentration of silicon in the binder solution is not more than 5% by weight.

19 . The method for producing the MgF 2 optical thin film according to claim 2 , wherein the sol solution is coated on the base material by a spin coat method or a dip coat method.

20 . The method for producing the MgF 2 optical thin film according to claim 2 , wherein the sol solution is coated on the base material in an atmosphere of relative humidity of 5% to 40% by a spin coat method.

21 . The method for producing the MgF 2 optical thin film according to claim 2 , wherein the sol solution is coated on the base material by a spin coat method by rotating the base material at a maximum number of revolutions of 500 rpm to 9,000 rpm within 3 seconds after supplying the sol solution to the base material.

22 . The method for producing the MgF 2 optical thin film according to claim 2 , wherein the MgF 2 optical thin film having a desired refractive index is produced by adjusting an SiO 2 -converted concentration of silicon in the binder solution.

23 . The method for producing the MgF 2 optical thin film according to claim 2 , wherein a plurality of pieces of the MgF 2 optical thin film having desired refractive index is produced by adjusting a molar ratio of fluorine contained in the fluorine compound to magnesium contained in the magnesium compound of the sol solution.

24 . The method for producing the MgF 2 optical thin film according to claim 2 , wherein the MgF 2 minute particles have an average particle diameter of 1 nm to 100 nm.