IP Library Granted Patent US 9,293,641
Granted Patent B2
US 9,293,641 · App. 13/299,714 · Granted Mar 22, 2016

Inverted optical device

Inventors: Ilyas Mohammed (San Clara, CA); Masud Beroz (Apex, NC); Liang Wang (Milpitas, CA)
Assignee: Invensas Corporation
H01L33/0079H01L33/62H01L33/58H01L2924/0002
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Quick Facts
Patent No.
US 9,293,641
App. No.
13/299,714
Granted
Mar 22, 2016
Kind
B2
Abstract

Inverted optical device. In accordance with an embodiment of the present invention, a plurality of piggyback substrates are attached to a carrier wafer. The plurality of piggyback substrates are dissimilar in composition to the carrier wafer. The plurality of piggyback substrates are processed, while attached to the carrier wafer, to produce a plurality of integrated circuit devices. A flip wafer is attached to the plurality of light emitting diodes, away from the carrier wafer and the carrier wafer is removed. The plurality of light emitting diodes may be singulated to form individual light emitting diode devices.

Claims (32)

1. A method comprising:

attaching a plurality of piggyback substrates to a carrier wafer using a plurality of bond layers, wherein said plurality of piggyback substrates are dissimilar in composition to said carrier wafer;

processing said plurality of piggyback substrates, while attached to said carrier wafer, to produce a plurality of light emitting diodes;

attaching a flip wafer to said plurality of light emitting diodes, away from said carrier wafer; and

removing only said carrier wafer and plurality of bond layers.

2. The method of claim 1 further comprising forming conductive structures through said flip wafer to electrically couple to contacts of said plurality of light emitting diode.

3. The method of claim 1 further comprising singulating said plurality of light emitting diodes to form individual light emitting diode devices.

4. The method of claim 1 further comprising removing said plurality of piggyback substrates.

5. The method of claim 4 further comprising roughening an exposed surface of said plurality of light emitting diodes subsequent to said removing said plurality of piggyback substrates.

6. The method of claim 4 wherein said removing said plurality of piggyback substrates comprises a laser lift-off process.

7. The method of claim 1 further comprising filling a volume between said plurality of light emitting diodes.

8. The method of claim 1 further comprising forming conductive vias through said flip wafer.

9. The method of claim 8 further comprising forming a plurality of package electrical contacts on said flip wafer electrically coupled to said conductive vias.

10. The method of claim 8 further comprising electrically coupling said conductive vias to terminals of said plurality of light emitting diodes.

11. The method of claim 1 further comprising forming a plurality of optical layers on said plurality of light emitting diodes, opposite from said flip wafer.

12. The method of claim 11 wherein one of said plurality of optical layers having the highest refractive index is placed closest to said plurality of light emitting diodes.

13. The method of claim 1 wherein said carrier wafer is transparent to ultra-violet light and suitable to bond to sapphire.

14. The method of claim 13 wherein said carrier wafer comprises quartz.

15. The method of claim 13 wherein said flip wafer comprises glass.

16. The method of claim 1 wherein a surface of said flip wafer closest to said plurality of light emitting diodes is polished.

17. The method of claim 1 further comprising polishing said plurality of piggyback substrates subsequent to said removing said carrier wafer.

18. A method comprising:

bonding a piggyback substrate to a carrier wafer using a plurality of bond layers;

fabricating a light emitting diode on said piggyback substrate while bonded to said carrier wafer;

attaching a flip wafer to the top of said light emitting diode, away from said carrier wafer;

removing only said carrier wafer and plurality of bond layers; and

separating said piggyback substrate from said light emitting diode.

19. The method of claim 18 wherein said separating further comprises removing said carrier wafer.

20. The method of claim 18 further comprising forming electrical contacts from said light emitting diode to a side of said flip wafer away from said light emitting diode.

21. The method of claim 18 further comprising singulating said light emitting diode from any other device attached to said flip wafer.

22. The method of claim 21 wherein said singulating retains a portion of said flip wafer attached to said light emitting diode.

23. The method of claim 18 further comprising forming a plurality of optical layers on said plurality of light emitting diodes, opposite from said flip wafer.

Assignments (6)
CHANGE OF NAME Recorded Nov 24, 2025
From: INVENSAS CORPORATION
To: INVENSAS LLC
Reel/Frame 073508/0668 →
CHANGE OF NAME Recorded Nov 24, 2025
From: INVENSAS LLC
To: ADEIA SEMICONDUCTOR TECHNOLOGIES LLC
Reel/Frame 073508/0751 →
RELEASE OF SECURITY INTEREST Recorded Jun 11, 2020
From: ROYAL BANK OF CANADA
To: TESSERA, INC.; INVENSAS BONDING TECHNOLOGIES, INC. (F/K/A ZIPTRONIX, INC.); FOTONATION CORPORATION (F/K/A DIGITALOPTICS CORPORATION AND F/K/A DIGITALOPTICS CORPORATION MEMS); INVENSAS CORPORATION; TESSERA ADVANCED TECHNOLOGIES, INC; DTS, INC.; DTS LLC; PHORUS, INC.; IBIQUITY DIGITAL CORPORATION
Reel/Frame 052920/0001 →
SECURITY INTEREST Recorded Jun 1, 2020
From: ROVI SOLUTIONS CORPORATION; ROVI TECHNOLOGIES CORPORATION; ROVI GUIDES, INC.; TIVO SOLUTIONS INC.; VEVEO, INC.; INVENSAS CORPORATION; INVENSAS BONDING TECHNOLOGIES, INC.; TESSERA, INC.; TESSERA ADVANCED TECHNOLOGIES, INC.; DTS, INC.; PHORUS, INC.; IBIQUITY DIGITAL CORPORATION
To: BANK OF AMERICA, N.A.
Reel/Frame 053468/0001 →
SECURITY INTEREST Recorded Dec 2, 2016
From: INVENSAS CORPORATION; TESSERA, INC.; TESSERA ADVANCED TECHNOLOGIES, INC.; ZIPTRONIX, INC.; DIGITALOPTICS CORPORATION; DIGITALOPTICS CORPORATION MEMS; DTS, LLC; DTS, INC.; PHORUS, INC.; IBIQUITY DIGITAL CORPORATION
To: ROYAL BANK OF CANADA, AS COLLATERAL AGENT
Reel/Frame 040797/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 18, 2011
From: MOHAMMED, ILYAS; BEROZ, MASUD; WANG, LIANG
To: INVENSAS CORPORATION
Reel/Frame 027252/0681 →
Continuity (1)
Related Publication 20130126921A1 · May 23, 2013