Method for fabricating semiconductor device
View Patent ↗A method for fabricating a semiconductor device includes steps as following. First, a substrate with an edge-mark is provided. The substrate has a front-side surface and a back-side surface opposite to each other. The front-side surface has an active region and a peripheral region with an alignment mark formed thereon. Next, an optical shielding layer is formed over the back-side surface of the substrate. Next, a first photo mask is aligned to the substrate by standing on the edge-mark. Next, a portion of the optical shielding layer corresponding with the alignment mark is removed by using the first photo mask. Next, a second photo mask is aligned to the substrate by standing on the alignment mark. Then, a portion of the optical shielding layer corresponding with the active region is removed to expose a portion of the substrate by using the second photo mask for forming an optical shielding pattern.
1. A method for fabricating a semiconductor device, comprising the steps of:
providing a substrate with an edge-mark, the substrate has a front-side surface and a back-side surface opposite to each other, the front-side surface has an active region and a peripheral region with an alignment mark formed thereon;
forming an optical shielding layer over the back-side surface of the substrate;
aligning a first photo mask to the substrate according to the edge-mark;
removing a portion of the optical shielding layer corresponding with the alignment mark by using the first photo mask;
aligning a second photo mask to the substrate according to the alignment mark; and
removing a portion of the optical shielding layer corresponding with the active region by using the second photo mask to expose a portion of the substrate for forming an optical shielding pattern.
2. The method for fabricating the semiconductor device according to claim 1 , wherein the edge-mark is a notch.
3. The method for fabricating the semiconductor device according to claim 1 , further comprises the step of removing a portion of the remained optical shielding layer corresponding to the peripheral region to define a scribe line.
4. The method for fabricating the semiconductor device according to claim 3 , wherein the portion of the remained optical shielding layer corresponding to the peripheral region is removed by using the second photo mask to define the scribe line.
5. The method for fabricating the semiconductor device according to claim 1 , wherein at least an optical element has been formed within the active region of the front-side surface of the substrate.
6. The method for fabricating the semiconductor device according to claim 5 , wherein the at least one optical element is photoelectric transducer element.
7. The method for fabricating the semiconductor device according to claim 1 , further comprises the step of forming a color filter layer on the back-side surface of the substrate to cover the optical shielding pattern.
8. The method for fabricating the semiconductor device according to claim 7 , further comprises the step of forming at least one lens on the color filter layer.
9. The method for fabricating the semiconductor device according to claim 1 , further comprises the step of thinning the substrate from the back-side surface before forming the optical shielding layer.