Method of forming a semiconductor device and semiconductor device
View Patent ↗A method of forming a semiconductor device comprises forming a control electrode over a portion of a semiconductor layer, forming recesses extending into the semiconductor layer on opposing sides of the control electrode, and forming doped regions in the semiconductor layer through the recesses. The doped regions form current electrode regions of the semiconductor device and each doped region extends into the semiconductor layer from at least a base of a recess. The method further comprises forming, after forming the doped regions, strained semiconductor regions in the recesses, wherein a junction between each doped region and the semiconductor layer is formed below an interface between a strained semiconductor region and the semiconductor layer.
1. A semiconductor device comprising:
a semiconductor layer having a control electrode over a portion of the semiconductor layer;
a first strained semiconductor region formed adjacent to the control electrode to strain the semiconductor layer under the control electrode; and
a current electrode comprising a first doped region adjacent to the control electrode extending a predetermined depth below a lowest point of an interface between the semiconductor layer and the first strained semiconductor region by an amount in the range of five to ten nanometers.
2. The device of claim 1 , wherein the first strained region comprises a lattice structure that is the same as the semiconductor layer but that has a different lattice spacing than the semiconductor layer.
3. The device of claim 2 , wherein the lattice structure of the first strained region comprises silicon and germanium, and the semiconductor layer comprises silicon, but not germanium.
4. The device of claim 2 , wherein the first doped region is formed by implanting a dopant having a low implant energy.
5. The device of claim 4 , wherein the low implant energy is less than or equal to 1 keV.
6. The device of claim 5 , wherein implanting the dopant further comprises implanting a dopant having a high dose.
7. The device of claim 5 , wherein implanting the dopant further comprises implanting a dopant having a dose in the rage of 1e15e −2 to 1e17e −2 .
8. The device of claim 2 , wherein implanting the dopant further comprises implanting a dopant having a dose in the rage of 1e15e −2 to 1e17e −2 .
9. The device of claim 2 , wherein the first doped region is formed by implanting a dopant having a low implant energy that is greater than an implant energy used to form a lightly doped extension region.
10. The device of claim 1 , wherein the first doped region is an epitaxial grown doped layer.
11. The device of claim 1 , wherein the first doped region is an epitaxial grown doped layer comprising silicon, but not germanium.
12. A semiconductor device comprising:
a semiconductor layer having a control electrode over a portion of the semiconductor layer;
a first strained semiconductor region formed adjacent to the control electrode to strain the semiconductor layer under the control electrode; and
a current electrode comprising a first doped region adjacent to the control electrode extending below a lowest point of the first strained semiconductor region, and formed by a dopant having an implant energy of less than or equal to 1 keV.
13. The device of claim 12 , wherein the current electrode has a depth of five to ten nanometers.
14. The device of claim 13 , wherein the dopant has a high dose.
15. The device of claim 13 , wherein forming the dopant comprises implanting a dose of the dopant the rage of 1e15e −2 to 1e17e −2 .
16. The device of claim 12 , further comprising a lightly doped extension region formed by a dopant having a lower implant energy than the first doped region.
17. The device of claim 16 , wherein the low implant energy is less than or equal to 1 keV.
18. The device of claim 16 , wherein an uppermost portion of the first doped region is below a lowermost portion of the lightly doped extension regions, wherein the uppermost portion of the first doped region is at a level of the device that is between the lowermost portion of the first doped region and the lowermost portion of the lightly doped extension regions.
19. The device of claim 18 , wherein implanting the dopant further comprises implanting a dopant having a dose in the rage of 1e15e −2 to 1e17e −2 .
20. The device of claim 13 , wherein implanting the dopant further comprises implanting a dopant having a dose in the rage of 1e15e −2 to 1e17e −2 .