ICP source design for plasma uniformity and efficiency enhancement
View Patent ↗An ICP A plasma reactor having an enclosure wherein at least part of the ceiling forms a dielectric window. A substrate support is positioned within the enclosure below the dielectric window. An RF power applicator is positioned above the dielectric window to radiate RF power through the dielectric window and into the enclosure. A plurality of gas injectors are distributed uniformly above the substrate support to supply processing gas into the enclosure. A circular baffle is situated inside the enclosure and positioned above the substrate support but below the plurality of gas injectors so as to redirect flow of the processing gas.
1. A plasma reactor, comprising:
an enclosure having a ceiling forming a dielectric window;
a substrate support positioned within the enclosure below the dielectric window;
an RF antenna positioned above the dielectric window to radiate RF power into the enclosure and sustain plasma over the substrate;
a precursor gas injector arrangement to supply precursor gas into the enclosure;
a baffle situated inside the enclosure and positioned above the substrate support but below the precursor gas injector arrangement, the baffle comprising a disk having a central opening therein so as to restrict flow of the precursor gas but expose the substrate to the plasma; and,
wherein the precursor gas injector arrangement comprises a plurality of nozzles evenly distributed around the periphery of the enclosure above the baffle but below the ceiling, and wherein the plasma is maintained in area above the baffle and the baffle restrict the flow of the plasma gas so as to direct the flow towards the center of the enclosure through the central opening.
2. The plasma reactor of claim 1 , wherein the baffle further comprises secondary openings distributed evenly about the central opening.
3. The plasma reactor of claim 1 , wherein the baffle comprises a conductive material.
4. The plasma reactor of claim 1 , wherein the baffle is movable vertically.
5. The plasma reactor of claim 1 , wherein the plasma gas injector arrangement further comprises a central nozzle provided centrally on the ceiling.
6. The plasma reactor of claim 1 , wherein the baffle further comprises a vertical extension extended from the central opening.
7. The plasma reactor of claim 6 , wherein the extension comprises a conical section.
8. The plasma reactor of claim 1 , wherein the baffle comprises a dielectric material.
9. The plasma reactor of claim 8 , wherein the dielectric material is selected from ceramic and quartz.
10. The plasma reactor of claim 1 , wherein the baffle comprises an RF antenna embedded therein.
11. The plasma reactor of claim 10 , wherein the baffle comprises a dielectric disk having the RF antenna embedded therein, and a conductive disk provided on one side of the baffle so as to block RF radiation through the baffle.
12. A plasma reactor comprising:
an enclosure having a cylindrical sidewall and a ceiling, wherein at least part of the ceiling forms a dielectric window;
a substrate support positioned within the enclosure below the dielectric window;
an RF antenna positioned above the dielectric window to radiate RF power through the dielectric window and into the enclosure so as to sustain plasma above the substrate;
a plurality of gas injectors distributed uniformly on the cylindrical sidewall above the substrate support to supply processing gas into the enclosure wherein the processing gas flow is directed by the injectors towards the center of the enclosure; and,
a circular baffle situated inside the enclosure and positioned above the substrate support but below the plurality of gas injectors, the baffle comprising a disk having a central opening therein so as to maintain the plasma in area above the baffle and redirect flow of the processing gas towards the center of the substrate and expose the substrate to the plasma through the central opening.
13. The plasma reactor of claim 12 , wherein the baffle comprises one of anodized aluminum, ceramic, or quartz.
14. The plasma reactor of claim 12 , wherein the baffle comprises extension extending downward from the opening towards the substrate support to thereby define a gap between the baffle and the substrate.
15. The plasma reactor of claim 14 , wherein the extension comprises one of a cylindrical section or conical section.
16. The plasma reactor of claim 14 , wherein the gap is variable.
17. A method of fabricating a semiconductor substrate, comprising:
placing the substrate on a substrate support positioned within a plasma reactor, wherein the plasma reactor comprises an enclosure having a cylindrical sidewall and a ceiling, wherein at least part of the ceiling forms a dielectric window, an RF antenna is positioned above the dielectric window to radiate RF power through the dielectric window and into the enclosure, and a plurality of gas injectors are distributed on the cylindrical sidewall uniformly above the substrate;
positioning a circular baffle having a central opening inside the enclosure such that the baffle is above the substrate support but below the plurality of gas injectors so as to define a gap above the substrate;
supplying process gas to the injectors and configuring the baffle to maintain the plasma in area above the baffle and direct the process gas towards the center of the substrate through the central opening; and,
applying RF power to the RF antenna.
18. The method of claim 17 , further comprising varying the gap.