Patent Assignment
Reel/Frame 051343/0271
Correction of Name
Recorded: 2019-12-18
Pages: 3
Assignor
Assignee
ADVANCED MICRO-FABRICATION EQUIPMENT INC. CHINA
188 TAIHUA ROAD, JINQIAO EXPORT PROCESSING ZONE (SOUTH AREA), PUDONG, SHANGHAI 201201, CHINA
Covered Properties
(21)
Rf Matching Network of a Vacuum Processing Chamber and Corresponding Configuration Methods
Multi-Station Workpiece Processors, Methods of Processing Semiconductor Workpieces Within Multi-Station Workpiece Processors, and Methods of Moving Semiconductor Workpieces Within Multi-Station Workpiece Processors
Vacuum Processing Chamber and Method of Processing a Semiconductor Work Piece
Semiconductor Processing System; a Semiconductor Processing Chamber; and a Method for Loading, Unloading and Exchanging Semiconductor Work Pieces from a Semiconductor Processing Chamber
Plasma Processing Apparatus
Plasma confinement apparatus, and method for confining a plasma
Gas Distribution Assembly for Use in a Semiconductor Work Piece Processing Reactor
Silicon Carbide Gas Distribution Plate and Rf Electrode for Plasma Etch Chamber
Multiple Frequency Plasma Chamber, Switchable Rf System, and Processes Using Same
Multi-Station Decoupled Reactive Ion Etch Chamber
Multi-Station Plasma Reactor with Multiple Plasma Regions
Capacitive Cvd Reactor and Methods for Plasma Cvd Process
System and Method of Sensing and Removing Residual Charge from a Processed Wafer
Plasma Processing Apparatus
Method and System for Autotuning of Rf Match
Icp Source Design for Plasma Uniformity and Efficiency Enhancement
Plasma Confinement Apparatus, and Method for Confining a Plasma
Gas Shower Device, Chemical Vapor Deposition Device and Method
Plasma Process Apparatus with Low Particle Contamination and Method of Operating the Same
Plasma Reactor Having a Function of Tuning Low Frequency Rf Power Distribution
Plasma Processing System and Operating Method of the Same
Related Assignments
(17)
Other recorded transfers of the patents in this record — the chain of ownership.
Assignment of Assignor's Interest
Feb 8, 2006
From: XIA, YAOMIN
To: ADVANCED MICRO-FABRICATION EQUIPMENT, INC. ASIA
Reel/Frame 017553/0870 →
Assignment of Assignor's Interest
Feb 9, 2006
From: TODAKA, RYOJI
To: ADVANCED MICRO-FABRICATION EQUIPMENT, INC. ASIA
Reel/Frame 017569/0811 →
Assignment of Assignor's Interest
May 24, 2006
From: CHEN, AIHUA
To: ADVANCED MICRO-FABRICATION EQUIPMENT, INC. ASIA
Reel/Frame 017924/0280 →
Assignment of Assignor's Interest
May 24, 2006
From: QIAN, QING
To: ADVANCED MICRO-FABRICATION EQUIPMENT, INC. ASIA
Reel/Frame 017923/0094 →
Assignment of Assignor's Interest
May 24, 2006
From: XIA, YAOMIN
To: ADVANCED MICRO-FABRICATION EQUIPMENT, INC. ASIA
Reel/Frame 017924/0291 →
Assignment of Assignor's Interest
Oct 10, 2006
From: NI, TOM; CHEN, JINYUAN; QIAN, QING; FU, YUEHONG
To: ADVANCED MICRO-FABRICATION EQUIPMENT, INC. ASIA
Reel/Frame 018401/0188 →
Assignment of Assignor's Interest
Nov 20, 2006
From: CHEN, AIHUA; WANG, SHULIN; HO, HENRY; YIN, GERALD
To: ADVANCED MICRO-FABRICATION EQUIPMENT, INC. ASIA
Reel/Frame 018631/0672 →
Assignment of Assignor's Interest
Mar 21, 2007
From: WU, ROBERT; NI, TUQIANG
To: ADVANCED MICRO-FABRICATION EQUIPMENT, INC. ASIA
Reel/Frame 019044/0296 →
Assignment of Assignor's Interest
Apr 25, 2007
From: CHEN, JINYUAN; YIN, GERALD; QIAN, XUEYU; NI, TUQIANG
To: ADVANCED MICRO-FABRICATION EQUIPMENT, INC. ASIA
Reel/Frame 019208/0725 →
Assignment of Assignor's Interest
Jul 2, 2007
From: YIN, GERALD; NI, TUQIANG; CHEN, JINYUAN; QIAN, XUEYU
To: ADVANCED MICRO-FABRICATION EQUIPMENT, INC. ASIA
Reel/Frame 019508/0705 →
Assignment of Assignor's Interest
Dec 20, 2007
From: CHEN, AIHUA; LIU, YIJUN; CHEN, JINYUAN; LUO, LEE
To: ADVANCED MICRO-FABRICATION EQUIPMENT, INC. ASIA
Reel/Frame 020280/0740 →
Assignment of Assignor's Interest
Jul 6, 2009
From: YIN, GERALD; CHEN, JINYUAN; NI, TUQIANG
To: ADVANCED MICRO-FABRICATION EQUIPMENT, INC. ASIA
Reel/Frame 022919/0030 →
Assignment of Assignor's Interest
Jul 17, 2009
From: NI, TUQIANG; CHEN, JINYUAN; WANG, YE; DU, RUOXIN
To: ADVANCED MICRO-FABRICATION EQUIPMENT, INC. ASIA
Reel/Frame 022974/0346 →
Assignment of Assignor's Interest
Jan 5, 2012
From: YANG, JAMES; LIU, STANLEY; XI, ZHAOHUI
To: ADVANCED MICRO-FABRICATION EQUIPMENT, INC. ASIA
Reel/Frame 027488/0867 →
Assignment of Assignor's Interest
Jan 5, 2012
From: GANG, SHI; XU, SONGLIN; NI, TUQIANG
To: ADVANCED MICRO-FABRICATION EQUIPMENT, INC. ASIA
Reel/Frame 027488/0954 →
Assignment of Assignor's Interest
Jan 14, 2015
From: NI, TUQIANG; CHEN, JINYUAN; QIAN, QING; FU, YUEHONG
To: ADVANCED MICRO-FABRICATION EQUIPMENT, INC. ASIA
Reel/Frame 034764/0301 →
Assignment of Assignor's Interest
Jan 26, 2016
From: ADVANCED MICRO-FABRICATION EQUIPMENT, INC. ASIA
To: ADVANCED MICRO-FABRICATION EQUIPMENT, INC. CHINA
Reel/Frame 037578/0026 →