Integrated heterojunction semiconductor device and method for producing an integrated heterojunction semiconductor device
A method of producing a semiconductor component is provided. The method includes providing a silicon substrate having a <111>-surface defining a vertical direction, forming in the silicon substrate at least one electronic component, forming at least two epitaxial semiconductor layers on the silicon substrate to form a heterojunction above the <111>-surface, and forming a HEMT-structure above the <111>-surface.
1. A semiconductor device, comprising:
a first semiconductor body comprising an electronic component and being formed by a monocrystalline silicon substrate having a <111>-surface defining a vertical direction, the electronic component disposed in a well of a first conductivity type formed in the first semiconductor body, the electric component comprising an active device region of a second conductivity type opposite the first conductivity type extending from the <111>-surface into the well and forming a p-n junction with the well, the first semiconductor body further comprising a well-isolating region of the second conductivity type extending from the <111>-surface at least partially into the first semiconductor body and laterally surrounding the well, the well-isolating region electrically decoupling the electronic component disposed in the well from a neighboring electric component formed in the first semiconductor body;
a second semiconductor body in contact with the <111>-surface of the monocrystalline silicon substrate and comprising first and second lateral sections that are laterally adjacent to one another and a heterojunction extending throughout the first and second lateral sections, the first lateral section comprising an HEMT-structure comprising a channel formed at the heterojunction and a gate electrode arranged above the channel; and
a conductive plug extending directly from the active device region through the heterojunction in the second lateral section of the second semiconductor body to a surface of the second semiconductor body,
wherein the HEMT-structure partially overlaps with the active device region of the electronic component in the vertical direction.
2. The semiconductor device of claim 1 , wherein the electronic component is a bipolar semiconductor structure or a resistor.
3. The semiconductor device of claim 2 , wherein the bipolar semiconductor structure comprises at least one of a bipolar transistor and a bipolar diode.
4. The semiconductor device of claim 1 , wherein the second semiconductor body comprises a wide band-gap semiconductor material.
5. The semiconductor device of claim 1 , wherein the second semiconductor body comprises at least one of a GaN-layer, AlN-Layer and InxAlyGa(1-x-y)N-layer.
6. The semiconductor device of claim 1 , wherein the HEMT-structure comprises a source region, a drain region and the channel region extending at the heterojunction between the source region and the drain region.
7. The semiconductor device of claim 1 , wherein the electronic component forms at least a part of a temperature sensor, a driver circuit, a measuring circuit or an electro-static discharge protection circuit for the HEMT structure.
8. The semiconductor device of claim 1 , wherein the well-isolating region comprises an upper portion and a lower portion.
9. The semiconductor device of claim 1 , wherein the well-isolating region is connected to a reference potential.
10. The semiconductor device of claim 1 , wherein the monocrystalline silicon substrate comprises a bulk mono-crystalline material of the second conductivity type and at least one epitaxial layer of the first conductivity type formed on the bulk mono-crystalline material, and wherein the well-isolating region extends from the at least one epitaxial layer at least partially into the bulk mono-crystalline material.
11. The semiconductor device of claim 1 , wherein the monocrystalline silicon substrate comprises a bulk mono-crystalline material of the second conductivity type and at least one epitaxial layer of the first conductivity type formed on the bulk mono-crystalline material, and wherein a buried layer of the first conductivity type is formed between the well and the bulk mono-crystalline material.
12. The semiconductor device of claim 11 , wherein the buried layer extends across part of a pn-junction between the bulk mono-crystalline material and the at least one epitaxial layer.
13. The semiconductor device of claim 11 , further comprising a buried contact region of the first conductivity type formed in the well above and in contact with the buried layer.
14. The semiconductor device of claim 13 , further comprising a drain/collector region of the first conductivity type formed in the well above the buried layer and a source/emitter region of the first conductivity type embedded in the active device region, and wherein the buried layer is electrically connected to the drain/collector region via the buried contact region.
15. The semiconductor device of claim 1 , wherein the electronic component is a transistor, wherein the active device region is a base region of the transistor, and wherein a source/emitter region of the transistor is embedded in the base region.