Semiconductor device and method for manufacturing the same
It is an object to provide a semiconductor device including a thin film transistor with favorable electric properties and high reliability, and a method for manufacturing the semiconductor device with high productivity. In an inverted staggered (bottom gate) thin film transistor, an oxide semiconductor film containing In, Ga, and Zn is used as a semiconductor layer, and a buffer layer formed using a metal oxide layer is provided between the semiconductor layer and a source and drain electrode layers. The metal oxide layer is intentionally provided as the buffer layer between the semiconductor layer and the source and drain electrode layers, whereby ohmic contact is obtained.
1. A method of manufacturing a semiconductor device comprising the steps of:
forming a first insulating film over a gate electrode, the first insulating film comprising silicon, nitrogen and hydrogen;
forming a second insulating film comprising silicon and oxygen on the first insulating film;
heating the first insulating film to remove at least a portion of the hydrogen from the first insulating film;
forming an oxide semiconductor film on the second insulating film after the step of heating the first insulating film, the oxide semiconductor film including a region to become a channel formation region;
treating an upper surface of the oxide semiconductor film with a plasma of gas containing oxygen;
forming a third insulating film over the oxide semiconductor film, the third insulating film comprising silicon and oxygen;
forming a fourth insulating film over the third insulating film, the fourth insulating film comprising a nitride; and
annealing the oxide semiconductor film after forming the fourth insulating film.
2. The method according to claim 1 , wherein the gas comprises N 2 O.
3. The method according to claim 1 , wherein the gas comprises 0 2 .
4. The method according to claim 1 , wherein the nitride is silicon nitride.
5. The method according to claim 1 , wherein the step of heating is performed prior to the formation of the second insulating film.
6. The method according to claim 1 , wherein the first insulating film is formed by plasma CVD.
7. The method according to claim 1 , wherein the second insulating film is formed by sputtering.
8. The method according to claim 1 , wherein the oxide semiconductor film is formed by sputtering in an atmosphere containing oxygen at greater than or equal to 90%.
9. The method according to claim 1 , wherein the second insulating film is formed by sputtering in an atmosphere containing oxygen at greater than or equal to 90%.
10. The method according to claim 1 , wherein the oxide semiconductor film comprises indium.
11. The method according to claim 1 , wherein the oxide semiconductor film comprises indium, gallium, and zinc.
12. The method according to claim 1 , further comprising a step of forming a source electrode and a drain electrode over the oxide semiconductor film prior to the step of treating the upper surface of the oxide semiconductor film with the plasma.